关键词: 真空卷绕, 镀铝设备, 离子束, 辅助沉积, 氧化铝膜

Abstract: This paper introduces an ion beam assisted deposition surface modification technology combined with ion implantation and vapor deposition film based on general vacuum winding aluminum plating machine. By adding a set of auxiliary bombarding ion source on ordinary winding plating equipment to establish an ion assisted deposition system, transparent alumina membrane plating can be realized. The equipment structure, characteristics and working principle of this coating method are described, the application prospect of this coating method is presented. Aluminized film plating can also be realized on the equipment, breaking through the single response of ordinary aluminum-based coating types. This technique responds to the national call for the realization of the localization of aluminum oxide evaporation coating equipment.

Key words: vacuum winding, aluminum plating equipment, ion beam, auxiliary deposition, aluminum oxide film