阀芯倾角对分子通量影响的研究*

doi:10.13385/j.cnki.vacuum.2026.04.01

摘要/Abstract

摘要： 流量阀作为分子束外延（molecular beam epitaxy,MBE）系统的核心部件,其几何精度直接决定镀膜室内分子通量的控制性能与薄膜沉积的稳定性,阀芯偏斜会对分子通量产生影响。研究采用实验与模拟相结合的方法,系统探究不同倾角对分子流量的影响。通过搭建由砷蒸发腔、流量阀、裂解源和镀膜腔组成的实验系统,利用质谱仪测量不同阀芯行程下镀膜腔中砷原子信号计算本底等效压力（background equivalent pressure, BEP）,作为分子通量的表征参数。实验结果显示,BEP随阀芯行程增加呈线性增长,当行程超过80%后,增速趋于平缓。在模拟计算方面,基于角系数模型分析了不同阀芯结构及行程对流量阀出口压力的影响。计算结果表明：在三种方向倾角下,阀芯行程为1~2 mm时,出口压力相较于原始结构有所下降,最大降幅为18.4%;而在其他行程下出口压力则上升,最大升幅为6.09%,且随着行程继续增加,升幅逐渐减小并趋近于零。倾斜角度越大,出口压力偏离原始值的程度也越大;当阀芯行程增至16 mm时,该偏差逐渐减小并最终趋近于零。

关键词: 流量阀, 分子通量, 阀芯倾角, 角系数法, 阀芯行程

Abstract: The flow control valve, as a core component of the molecular beam epitaxy (MBE) system, determines the control performance of molecular flux in the deposition chamber and the stability of thin-film growth through its geometric precision, while the valve spool inclination angle can influence the molecular flux. This study combined experimental and simulation methods to systematically investigate the impact of different tilt angles on molecular flow. An experimental system consisting of an arsenic evaporation cell, a flow control valve, a cracker source, and a deposition chamber was constructed. A mass spectrometer was used to measure arsenic atom signals in the deposition chamber at different valve spool travel distances, and the background equivalent pressure (BEP) was calculated as a representation parameter for molecular flux. The experimental results show that the BEP increases linearly with the valve spool travel distance. However, when the travel exceeds 80%, the growth rate tends to plateau. On the simulation side, the influence of different valve spool structures and travel distances on the outlet pressure of the flow valve was analyzed based on the view factor model. The simulation results indicate that, under three different directional inclination angles, the outlet pressure decreases compared to the original structure when the valve spool travel is 1-2 mm, with a maximum reduction of 18.4%. At other travel distances, the outlet pressure increases, with a maximum increase of 6.09%. Moreover, as the travel distance continues to increase, the increase gradually diminishes and approaches zero. The larger the inclination angle, the greater the deviation of the outlet pressure from the original value. When the valve spool travel increases to 16 mm, this deviation gradually decreases and ultimately approaches zero.

Key words: flow valve, molecular flux, inclination angle, view factor method, valve spool travel distance

中图分类号: TH137.522

王俊莉, 于广琛, 王晓冬. 阀芯倾角对分子通量影响的研究^*[J]. 真空, 2026, 63(4): 1-7.

WANG Junli, YU Guangchen, WANG Xiaodong. Study on the Effect of Spool Inclination Angle on Molecular Flux[J]. VACUUM, 2026, 63(4): 1-7.

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