面向真空装备的ZnSe红外窗口性能研究及其在热成像检测中的应用*

doi:10.13385/j.cnki.vacuum.2026.03.12

摘要/Abstract

摘要： 为满足航天、核电等领域真空装备中紧固件缺陷高精度检测需求,评估ZnSe作为红外窗口材料在热稳定性、光学性能及放气控制方面的适应性。构建材料性能与识别效果关联模型,结合8~12 μm波段光学分析及热力学、真空放气建模,量化成像质量影响机制。搭建真空实验平台模拟热循环、微粒冲击及长期放气工况,对比ZnSe与Ge、AMTIR-1性能。结果显示,ZnSe真空透过率达75%,信噪比提升至45~50 dB,边缘锐度≤3像素;缺陷识别准确率93~95%,误判率≤3%、漏检率≤2%。500 h运行与100次热循环后,材料的透过率相对衰减0.8%,无裂纹,放气率≤5×10^-9 Pa・L/（s·cm²）,密封稳定。研究表明,ZnSe具备优异真空红外成像性能与环境适应性,适用于复合机器人热成像识别系统,为真空检测装备提供关键材料支撑。

关键词: ZnSe红外窗口, 热成像识别系统, 真空环境, 紧固件缺陷检测, 真空适应性

Abstract: To address the high-precision defect detection requirements of fasteners in vacuum equipment used in aerospace and nuclear power systems, this study evaluates the adaptability of ZnSe infrared window materials in terms of thermal stability, optical performance, and outgassing control. A correlation model between material properties and defect-recognition performance was established by integrating optical analysis in the 8-12 μm band with thermodynamic and vacuum-outgassing modeling, thereby quantifying the factors affecting imaging quality. A vacuum experimental platform was developed to simulate thermal cycling, particle impacts, and long-term outgassing conditions, and the performance of ZnSe was compared with that of Ge and AMTIR-1 materials. The results show that ZnSe exhibits a vacuum transmittance of 75%, a signal-to-noise ratio (SNR) of 45-50 dB, and an edge sharpness of ≤3 pixels. The defect-recognition accuracy reached 93-95%, with false-detection and missed-detection rates of ≤3% and ≤2%, respectively. After 500 hours of operation and 100 thermal cycles, the transmittance decreased by only 0.8%, with no cracking observed, and the outgassing rate remained ≤5×10^-9 Pa·L/(s·cm²), ensuring excellent sealing stability. These results demonstrate that ZnSe possesses superior vacuum infrared imaging performance and environmental adaptability, making it well suited for composite robotic thermal-imaging recognition systems and providing essential material support for high-vacuum inspection equipment.

Key words: ZnSe infrared window, thermal imaging recognition system, vacuum environment, fastener defect detection, vacuum adaptability

中图分类号: TN219

陈典龙, 邹顺, 许阳, 王东. 面向真空装备的ZnSe红外窗口性能研究及其在热成像检测中的应用^*[J]. 真空, 2026, 63(3): 83-90.

CHEN Dianlong, ZOU Shun, XV Yang, WANG Dong. Application of ZnSe Vacuum Infrared Window Material in Fastener Detection of Composite Robot Thermal Imaging Recognition System[J]. VACUUM, 2026, 63(3): 83-90.

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