250mm口径低温泵设计*

doi:10.13385/j.cnki.vacuum.2020.02.03

Abstract

Abstract: This paper introduces the design and calculation of the 250mm caliber cryopump, and details the design of components such as pump body, adsorption array, radiation shield and louvers. The strength of the shell and the heat load of the cold screen and the baffles and condensing plates are calculated in detail. By analyzing the temperature field of the cold screen, the barrier plate and the adsorption array, the accuracy of the calculation is checked, and the theoretical basis and temperature reference are provided for the actual test.

Key words: cryopump, refrigerator, adsorption array, thermal load, finite element analysis

CLC Number:

TB752+.53

ZENG Huan, DENG Jia-liang, SUN Zhi-he. Design of the 250mm Caliber Cryopump[J].VACUUM, 2020, 57(2): 13-16.

References 15

[1]	吴德忠, 周利娟. 新型HIRFL-800低温泵的设计及热负荷的计算[J]. 低温工程, 2002, 126(3): 48-52.
[2]	彭楠, 熊联友, 刘立强, 等. 低温真空泵辐射挡板流导几率的计算[J]. 低温工程, 2006, 22(6): 21-24.
[3]	Man-Sik Myeong, Yun-Jae Kim, Peter J Budden.Limit load interacting of cracked branch junctions under combined pressure and bending[J]. Engineering Fracture Mechanics, 2012, 86(5): 1-12.
[4]	武义锋, 徐中堂. DN900LN2型低温泵的研制[J]. 真空与低温, 2013, 19(2): 77-81.
[5]	周家屹, 孙庆艳, 许令顺, 等. 低温泵用吸附材料的研究概述[J]. 低温与超导, 2014, 17(1): 29-34.
[6]	陈珑彦, 徐永雨. 基于ANSYS的高真空超低温泵池的应力有限元分析[J]. 机械工程与自动化, 2016, 196(3): 81-82.
[7]	赵月帅, 刘振春, 张广慧, 等. 环境设备用自屏蔽低温泵的研制与性能测试[J]. 南京工程学院学报(自然科学版), 2017, 15(4): 32-35.
[8]	査方正, 李勇, 李强, 等. HL-2M装置低温冷凝泵在抽气工况下的热负荷分析[J]. 核聚变与等离子体物理, 2018, 38(3): 287-292.
[9]	谢韩, 宋云涛, 王松可. ITER低温泵外部容器的结构设计与应力分析[J]. 核聚变与等离子体物理, 2016, 36(2): 181-187.
[10]	孙立臣, 赵月帅, 李明利, 等. 空间环境设备用大口径制冷机低温泵研制技术现状和发展[J]. 北京卫星环境工程研究院, 2018, 55(1)1-6.
[11]	高香院编著. 现代低温泵[M]. 西安: 西安交通大学出版社, 1990.
[12]	徐烈, 李兆慈, 孙恒, 等. 低温真空技术[M]. 北京: 机械工业出版社, 2007. 9.
[13]	达道安. 真空设计手册(修订版)[M]. 北京: 国防工业出版社, 1991. 11.
[14]	徐成海, 张世伟, 谢元华, 等. 真空低温技术与设备[M]. 北京: 冶金工业出版社, 2007.
[15]	安徽万瑞冷电科技有限公司. 一种新型低温泵冷伞: 中国, ZL201520596960. 9[P]. 2015. 12. 23.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4]	ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8]	JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .

Design of the 250mm Caliber Cryopump

Abstract

Cite this article

share this article

References 15

Related Articles 3

Metrics

Comments

Recommended 10

[1]	SUN Zhi-ming, HE Chao, ZHANG Ying-li, ZHU Zhi-peng, YUE Xiang-ji, ZHANG Bin, BA De-chun. Design and finite element analysis of large-scale horizontal vacuum container [J]. VACUUM, 2019, 56(2): 26-30.
[2]	ZHAO Yue-shuai, SUN Li-chen, SHAO Rong-ping, YAN Rong-xin, SUN Wei, LI Zheng. Design and performance test of DN1250 LN₂ refrigerator cooled cryopumps [J]. VACUUM, 2019, 56(1): 1-5.
[3]	SHEN Fu-bo, WANG Jie, ZHAI Yue, ZHOU Zhi-peng. Light shell design of low temperature adsorption bed and its optimization [J]. VACUUM, 2018, 55(6): 42-44.