欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2021, Vol. 58 ›› Issue (3): 59-64.doi: 10.13385/j.cnki.vacuum.2021.03.12

• Measurement and Control • Previous Articles     Next Articles

Study on the Method of Indirectly Measuring the Vacuum Degree of Seals by Using Leakage Rate

LIU Guo-ting, CHENG Yong-jun, CHEN Lian, WANG Yu-jie, SUN Wen-jun, DONG Meng, WU Cheng-yao, SONG Yi, WEI Ning-fei   

  1. Science and Technology on Vacuum Technology and Physcis Laboratory,Lanzhou Institude of Physics,Lanzhou 730000,China
  • Received:2020-06-19 Online:2021-05-25 Published:2021-06-01

Abstract: This paper proposes a method to indirectly measure the vacuum degree using the leak rate to solve the problem of measuring the vacuum degree in the seal cavity. On this basis,relevant experiments are carried out to explore the feasibility of the method in practical applications and relevant applicable conditions. The experiment takes a simulation part connected with metal capillaries of different sizes as the research object,and uses the dynamic flow method to measure the leakage rate of the simulation part,thereby indirectly obtaining the vacuum degree in the cavity of the simulation part. The experimental results show that the difference between the vacuum of the simulated part measured indirectly using the leak rate and the vacuum of the simulated part measured in situ using the Pirani gauge is about 15%,and the deviation is small. At the same time,the experiment also indicated that the method has restrictive applicable conditions including measurement range,reaction time and so on,and made a reasonable explanation in theory,and then perfected the method and laid the foundation for practical application.

Key words: seal, indirect measurement of vacuum, leakage rate, conductance, dynamic flow method, capillary

CLC Number: 

  • TB77
[1] 徐海峰, 王波, 罗高乔, 等. 大冷量气体轴承斯特林制冷机与杜瓦耦合漏热分析[J]. 低温与超导, 2020, 48(4): 15-18+72.
[2] 张亚平, 朱颖峰, 徐冬梅, 等. 提升红外焦平面探测器杜瓦组件的储存寿命[J]. 真空科学与技术学报, 2018, 38(8): 643-649.
[3] 宋萌, 王利琴, 李敬东, 等. 100kJ高温超导磁储能系统的低温杜瓦设计[J]. 低温与超导, 2013, 41(4):4-7+30.
[4] WANG D L, LI J J, WANG X H, et al. Measurement of gas permeation through packaging materials of OLED by mass spectrometry[A]. Proc. SPIE7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology[C/OL]. 2010[2010-10-22]. https://doi.org/10.1117/12.866110.
[5] CHOI B D, KAKKAD R.Enhancement of Solid-phase Crystallization Kinetics of Amorphous Silicon by Annealing in a High-pressure H2O Ambien[J]. Journal of the Korean Physical Society, 2009, 55(1): 1-4.
[6] 陈联, 董猛, 刘国庭, 等. 电真空器件在轨加电时腔体压力变化分析[J]. 真空, 2020, 57(3): 61-66.
[7] 王帆, 刘磊, 张胜兵, 等. 一种MEMS陀螺晶圆级真空封装工艺[J]. 微纳电子技术, 2019, 56(3): 248-252.
[8] KIM J S, LEE S W, JUNG K D, et al.Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method[J]. Microelectronics Reliability, 2008, 48(6): 948-952.
[9] 黄炜昭. 变压器密封失效分析及防治措施研究[J]. 变压器, 2014, 51(5): 59-61.
[10] 杨奇岭, 赵峰. 变压器密封橡胶的老化[J]. 变压器, 2001, 38(6): 7-9.
[11] 朱绪飞, 文威, 贾红兵, 等. 电容器密封橡胶及其老化机理[J]. 弹性体, 2002, 12(1): 58-62.
[12] 赵耀洪, 钱艺华, 陈天生, 等. SF6气密封橡胶材料气体渗透特性研究[J]. 变压器, 2019, 55(10): 0116-0120.
[13] SONEY C, GEORGE A, NINAN K N, et al.Permeation of nitrogen and oxygen gases through styrene-butadiene rubber,natural rubber and styrene-butadiene rubber/natural rubber blend membranes[J]. European Polymer Journal, 2001, 37(1): 183-191.
[14] DENISOV E A, KOMPANIETS M V, KOMPANIETS T N, et al.Surface-limited permeation regime in the study of hydrogen interactions with metals[J]. Measurement, 2018, 117: 258-265.
[15] 王静, 李军建, 吴启鹏. 阻隔材料的气体渗透率[J]. 强激光与粒子束, 2012, 24(7): 1619-1623.
[16] 达道安. 真空设计手册: 第3版[M]. 北京: 国防科技工业出版社, 2004, 116-1131.
[1] ZHANG Long-he. Analysis and Treatment of Common Faults of Oil Sealed Rotary Vacuum Pump [J]. VACUUM, 2021, 58(3): 17-22.
[2] CAI Xiao, CAO Zeng, ZHANG Wei, LI Rui-jun, HUANG Yong. Development of Pre-pumping System for Vacuum Chamber of HL-2M [J]. VACUUM, 2021, 58(1): 33-37.
[3] ZHANG Shi-wei, SUN Kun, HAN Feng. Discussion on Several Common Problems in Screw Vacuum Pump Design [J]. VACUUM, 2021, 58(1): 23-28.
[4] HE Ping. Study on Leakage Rate Test Method for Composite Cylinder [J]. VACUUM, 2020, 57(6): 54-58.
[5] WANG Jin, WANG Chun-yong, FU Zhao-hui. Research Status of Brazing Seal Technology for Deep Space Exploration Sample Collection [J]. VACUUM, 2020, 57(5): 38-44.
[6] ZHANG Hai-feng, SUN Li-chen, GUO Chong-wu, QI Fei-fei, LI Wen-bin. Research on the Total Leakage Test Technology with Static Pressure Rise Method for Sealed Biological Payload [J]. VACUUM, 2020, 57(4): 46-49.
[7] LI Xiao-feng, HUANG Qiang-hua, CHEN Guang-qi, HE Xiao-dong, ZHU Ming. Simulated Experimental Study on Vacuum Life of Cryogenic Insulated Cylinders [J]. VACUUM, 2020, 57(1): 56-61.
[8] LIU Xing-yue, WANG Zhen, DOU Ren-chao, CUI Yu-hao, YANG Ding-kui. Developed a method to test total leakage rate of spacecraft based on helium mass spectrometry of LEYBOLD [J]. VACUUM, 2019, 56(2): 62-65.
[9] Alessandro Abatecola. A new high-conductance ion pump for particle accelerator [J]. VACUUM, 2019, 56(1): 16-19.
[10] GUO Chong-wu, SUN Li-chen, SUN Li-zhi, QI Fei-fei, LI Wen-bin. Mechanism research of double seal leakage in single-O-ring seal structure [J]. VACUUM, 2018, 55(6): 19-23.
[11] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample [J]. VACUUM, 2018, 55(6): 24-27.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
No Suggested Reading articles found!
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd