VACUUM ›› 2022, Vol. 59 ›› Issue (2): 1-5.doi: 10.13385/j.cnki.vacuum.2022.02.01
• Measurement and Control • Next Articles
XIONG Kang-lin1,2, FENG Jia-gui1,2, XIA Hui-zhi2, YANG Hui-yong2, ZHAO Yu-kun1, LU Shu-long1, ZHANG Yong-hong1
CLC Number:
| [1] DEVORET M H, SCHOELKOPF R J.Superconducting circuits for quantum information: an outlook[J]. Science, 2013, 339(6124): 1169-1174. [2] PRESKILL J.Quantum computing in the NISQ era and beyond[J]. Quantum, 2018, 2: 79. [3] ARUTE F, ARYA K, BABBUSH R, et al.Quantum supremacy using a programmable superconducting processor: 7779[J]. Nature, 2019, 574(7779): 505-510. [4] HUANG H L, WU D C, FAN D J, et al.Superconducting quantum computing: a review[J]. Science China Information Sciences, 2020, 63(8): 180501. [5] MÜLLER C, COLE J H, LISENFELD J. Towards understanding two-level-systems in amorphous solids: insights from quantum circuits[J]. Reports on Progress in Physics, 2019, 82(12): 124501. [6] SHALIBO Y, ROFE Y, SHWA D, et al.Lifetime and coherence of two-level defects in a Josephson junction[J]. Physical Review Letters, 2010, 105(17): 177001. [7] 张裕恒. 超导物理[M]. 合肥: 中国科学技术大学出版社, 2009: 348-356. [8] NGUYEN L, HASHIMOTO T, ZAKHAROV D N, et al.Atomic-scale insights into the oxidation of aluminum[J]. ACS Applied Materials & Interfaces, 2018, 10(3): 2230-2235. [9] WU Y L, DENG H, YU H F, et al.Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process[J]. Chinese Physics B, 2013, 22(6): 060309. [10] SHEN D, ZHU R, XU W, et al.Character and fabrication of Al/Al2O3/Al tunnel junctions for qubit application[J]. Chinese Science Bulletin, 2012, 57(4): 409-412. [11] FLÖTOTTO D, WANG Z M, JEURGENS L P H, et al. Intrinsic stress evolution during amorphous oxide film growth on Al surfaces[J]. Applied Physics Letters, 2014, 104(9): 091901. [12] KAMAL A, YODER J L, YAN F, et al. Improved superconducting qubit coherence with high-temperature substrate annealing[EB/OL]. (2016-06-29). https://arxiv.org/abs/1606.09262. [13] DE GRAAF S E, ADAMYAN A A, LINDSTRÖM T, et al. Direct identification of dilute surface spins on Al2O3: Origin of flux noise in quantum circuits[J]. Physical Review Letters, 2017, 118: 057703. [14] CAI N, ZHOU G, MÜLLER K, et al. Tuning the limiting thickness of a thin oxide Layer on Al(111)with Oxygen Gas Pressure[J]. Physical Review Letters, 2011, 107(3): 035502. [15] OSMAN A, SIMON J, BENGTSSON A, et al.Simplified Josephson-junction fabrication process for reproducibly high-performance superconducting qubits[J]. Applied Physics Letters, 2021, 118(6): 064002. [16] GRÜNHAUPT L, VON LÜPKE U, GUSENKOVA D, et al. An argon ion beam milling process for native AlOx layers enabling coherent superconducting contacts[J]. Applied Physics Letters, 2017, 111(7): 072601. [17] DUNSWORTH A, MEGRANT A, QUINTANA C, et al.Characterization and reduction of capacitive loss induced by sub-micron Josephson junction fabrication in superconducting qubits[J]. Applied Physics Letters, 2017, 111(2): 022601. [18] KELLY J S.Fault-tolerant superconducting qubits[D]. Santa Barbara: UCSB, 2015. [19] JEURGENS L P H, SLOOF W G, TICHELAAR F D, et al. Growth kinetics and mechanisms of aluminum-oxide films formed by thermal oxidation of aluminum[J]. Journal of Applied Physics, 2002, 92(3): 1649-1656. [20] NIK S, KRANTZ P, ZENG L, et al.Correlation between Al grain size, grain boundary grooves and local variations in oxide barrier thickness of Al/AlOx/Al tunnel junctions by transmission electron microscopy[J]. Springerplus, 2016, 5(1): 1067. |
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