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VACUUM ›› 2022, Vol. 59 ›› Issue (5): 38-44.doi: 10.13385/j.cnki.vacuum.2022.05.07

• Thin Film • Previous Articles     Next Articles

Development of High-Efficiency and Energy-Saving Parylene Vacuum Coating Equipment and Its Application in Agriculture

LI Zhi-sheng1, LIU Xiao-jiang2, DUAN Yu-quan3, LIN Qiong3, WANG Xiao-dong4   

  1. 1. Beijing Standfor Technoloyg Co., Ltd., Beijing 102400, China;
    2. School of Mechanical Engineering,Shenyang University of Technology, Shenyang 110870, China;
    3. Institute of Agri-food Science and Technology, Chinese Academy of Agriculture Science, Beijing 100905, China;
    4. School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China
  • Received:2021-11-05 Online:2022-09-25 Published:2022-09-28

Abstract: With the rapid development and wide application of parylene coating technology, how to effectively increase the utilization rate of parylene materials, improve the quality of the film, and reduce costs has been widely concerned in the industrial production process. In this paper, depending on the structural characteristics and application status of conventional parylene vacuum coating equipment, a type of parylene vacuum coating equipment with a built-in pyrolyzer is developed, in which flow characteristics of rare gas, heat transfer and industrial production requirements are concerned. At the same time, according to the unique environmental conditions of the parylene coating room and the characteristics of the film to resist acid and alkali, salt spray and mold, coating protection for flowers and low-moisture dry seeds is proposed, which will expand the application of parylene coating technology in the agricultural field.

Key words: parylene, vapor deposition, built-in pyrolyzer, dry seed

CLC Number: 

  • TH69
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