VACUUM ›› 2022, Vol. 59 ›› Issue (6): 40-44.doi: 10.13385/j.cnki.vacuum.2022.06.07
• Thin Film • Previous Articles Next Articles
CHEN Lan-lan, SUN Xiao-jie, WEI Lin-lin, REN Yue-qing, REN Dong-xue, LIANG Wen-bin
CLC Number:
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