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VACUUM ›› 2022, Vol. 59 ›› Issue (1): 24-28.doi: 10.13385/j.cnki.vacuum.2022.01.05

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The Luminescent Property of Al2O3:Ce MFRMS Thin Films Sputtered by Optimal Design of Experiments

LIAO Guo-jin, YAN Shao-feng, YI Deng-li, DAI Xiao-chun   

  1. Faculty of Mechanical Engineering and Automation,Liaoning University of Technology,jinzhou 121001,China
  • Received:2020-10-06 Online:2022-01-25 Published:2022-01-27

Abstract: The method of optimally designing experiments was introduced to study the properties of Al2O3:Ce luminescence thin films.Uniform design and quadratic general rotary unitized design were combined to build the equation between the luminescent intensity and the O2-/Ce3+ doping concentration.Genetic algorithm was introduced into the calculation to obtain the best luminescent intensity.The optimal amorphous Al2O3:Ce thin films were deposited by the MF reactive magnetron sputtering technique.Under 320nm ultraviolet excitation,the blue emission spectrum was detected.The luminescence mechanism was studied.The photoluminescence emission from these films was associated with 5d1 to 4f1 transitions of Ce3+ ions.The intensity of these peaks was strongly dependent on the amount of cerium and oxygen incorporated in the films.There were some Ce3+ in the Al2O3:Ce thin films by XPS measurement.The presence of cerium as well as the stoichiometry of these films were determined by energy dispersive X-ray spectroscope measurements.The crystalline structure of the sample was analyzed by X-ray diffractometry.

Key words: photoluminescence, experiment optimization, Al2O3, thin films, rare earth

CLC Number: 

  • TB43
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