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VACUUM ›› 2025, Vol. 62 ›› Issue (3): 65-69.doi: 10.13385/j.cnki.vacuum.2025.03.12

• Measurement and Control • Previous Articles     Next Articles

Study on a Calibration Method of Nonlinear Pirani Vacuum Transmitter

QIN Lulu, GAO Qiaofeng, ZHANG Shuai, LIU Ping, PAN Shouhu, ZHANG Kai, SAHNG Jiankang   

  1. Shandong Institute of Metrology, Jinan 250102, China
  • Received:2024-07-16 Online:2025-05-25 Published:2025-05-23

Abstract: A direct comparison calibration method for nonlinear Pirani vacuum transmitters using a comparative method vacuum standard device is introduced. Two uncertainty analysis methods, overall analysis method and point by point analysis method, are introduced in detail, taking Edward nonlinear Pirani vacuum gauge calibration uncertainty calculation as the example. The results show that when using the least squares method for linear fitting to evaluate the overall uncertainty, the logarithmic fitting method has better linearity and a relatively uniform distribution of data points compared to the direct fitting method. For this Edward nonlinear Pirani vacuum gauge, the overall analysis method yields an extended uncertainty of 7% (k=2), while the point by point analysis method yields an extended uncertainty of 0.04 V (k=2) at the 1.91 Pa measurement point.

Key words: nonlinear Pirani vacuum transmitter, linear fitting, uncertainty analysis

CLC Number:  TB772

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