VACUUM ›› 2026, Vol. 63 ›› Issue (2): 22-26.doi: 10.13385/j.cnki.vacuum.2026.02.03
• Thin Film • Previous Articles Next Articles
LIU Min, FU Liucheng, WU Liying, CHENG Xiulan, FU Xuecheng
CLC Number: TB43
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