一种基于钽阳极块体积收缩的高真空热处理炉校温方法研究*

doi:10.13385/j.cnki.vacuum.2026.04.08

Abstract

Abstract: Aiming at the problems of temperature stability and uniformity existing in the sintering process of tantalum powder in high-temperature and high-vacuum heat treatment furnace, this study proposes a new temperature calibration method based on the volume shrinkage characteristics of the anode block of tantalum electrolytic capacitors. By pressing tantalum anode blocks of specific specifications （1 g tantalum powder, with a diameter of 6 mm and a pressing density of 5.5 g/cm³）, under the sintering conditions of 1 500~2 000℃, a volume shrinkage ratio control model was established in combination with the 3σ principle of the Gaussian distribution. The experimental results show that this method can effectively monitor the temperature deviation in the front, middle and rear areas of the furnace. When the volume shrinkage ratio exceeds the confidence interval, it indicates that the thermocouple is attenuated and needs to be replaced in a timely manner. Compared with the traditional temperature calibration method using temperature measuring rings, this method has the characteristics of strong temperature adaptability and high precision （within ±5℃）, and can provide a reliable basis for the optimization of the sintering process of capacitor-grade materials of tantalum powder.

Key words: tantalum powder, vacuum heat treatment, volume shrinkage rate

CLC Number: TF841.6

LI Shaojun, LI Zhongxiang, CHEN Xueqing, DU Wei, GUI Yuping, LI Qifan. Study on Temperature Calibration Method for High-Vacuum Heat Treatment Furnace Based on Volume Shrinkage of Tantalum Anode Blocks[J].VACUUM, 2026, 63(4): 52-57.

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Study on Temperature Calibration Method for High-Vacuum Heat Treatment Furnace Based on Volume Shrinkage of Tantalum Anode Blocks

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