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VACUUM ›› 2022, Vol. 59 ›› Issue (3): 63-67.doi: 10.13385/j.cnki.vacuum.2022.03.13

• Measurement and Control • Previous Articles     Next Articles

An Application of Ultrasensitive Leak Detection Technology Integrated in High Pumping Speed Automatic Exhaust Table

TIAN Ming-li1, QIU Li1, DONG Yun-ning2,3, CHEN Jun-ru2,3, CHEN You-qi2,3, TANG Rong4, ZHANG Ji-feng4   

  1. 1. The 12th Research Institute of China Electronics Technology Group Corporation, Beijing 100016, China;
    2. Beijing Orient Institute of Measurement and Test, Beijing 100086, China;
    3. Beijing Engineering Research Center of Vacuum Measurement and Test, Beijing 100029, China;
    4. Beijing Vacuum Electronic Technology Co., Ltd., Beijing 100016, China
  • Received:2022-04-26 Online:2022-05-25 Published:2022-06-01

Abstract: An ultrasensitive leak detection technology applied to high pumping speed automatic exhaust system is designed to solve the problem of small leak detection with leakage rate less than 5×10-12Pa·m3/s in the process of exhaust and sealing off for traveling wave tube. The device is mainly composed of main vacuum system, external vacuum and baking system, cumulative comparison leak detection system, standard gas flow system and electrical control system. The exhaust table has eight stations, whose limit vacuum reaches ultra-high vacuum without load, and the vacuum furnace can be heated to high temperature. The whole process automation of exhaust process is achieved using program control and possessing functions of automatic collection, storage, analysis and transmission. The standard gas flow system can provide a micro flow from 5×10-7Pa·m3/s to 5×10-16Pa·m3/s, and the lower limit of cumulative comparison leak detection system reaches 5×10-16Pa·m3/s, with a combined standard uncertainty of leak detection results less than 15%.

Key words: traveling wave tube, ultra-sensitive leak detection, micro gas flow, uncertainty

CLC Number: 

  • TB79
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