沉积温度对管内高功率脉冲磁控溅射制备Cr涂层性能影响*

doi:10.13385/j.cnki.vacuum.2026.02.02

Abstract

Abstract: The lack of anti-corcosion performance on the inner surface of the tube seriously limits its service life, so it is particularly important to prepare a high quality coating on the inner wall of the tube. In this paper, the bipolar high power impulse magnetron sputtering technology is used to place the cylindrical target as the cathode in the tube to prepare the high-quality Cr coating. Through SEM, XRD, scratches, electrochemical corrosion and high temperature oxidation, the influence of the deposition temperature on the microstructure, mechanical properties, corrosion resistance and oxidation resistance of Cr coating deposited in the tube was studied. The results show that as the deposition temperature increases from 25 ℃ to 300 ℃, the Cr coating exhibits a preferred (110) orientation; affected by thermal stress, the film exhibits the optimal toughness at 100 ℃; the coating prepared at 25 ℃ exhibits the highest corrosion resistance and high-temperature oxidation resistance. Among its properties, the corrosion current density can be as low as 4.9×10^-4 A·cm^-2, along with the smallest oxide layer thickness and the least oxidation weight gain. The smaller grain size and higher density inhibit the diffusion of corrosive media and oxygen. When the deposition temperature is 100 ℃, the corrosion resistance and oxidation resistance of the coating are similar to those at 25 ℃. Considering its microstructure, mechanical properties, and service performance comprehensively, the coating deposited at 100 ℃ exhibits the optimal overall performance.

Key words: inner surface, high power impulse magnetron sputtering(HiPIMS), Cr coating, film-substrate adhesion, corrosion resistance

CLC Number: TB43

LIU Jintao, ZHU Hongbo, MU Qing, HU Tianshi, TIAN Xiubo, GONG Chunzhi, GENG Huiyuan, WANG Zijia. Effect of Deposition Temperature on the Properties of Cr Coatings Prepared by High Power Impulse Magnetron Sputtering Inside Tubes[J].VACUUM, 2026, 63(2): 13-21.

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Effect of Deposition Temperature on the Properties of Cr Coatings Prepared by High Power Impulse Magnetron Sputtering Inside Tubes

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