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VACUUM ›› 2026, Vol. 63 ›› Issue (3): 28-35.doi: 10.13385/j.cnki.vacuum.2026.03.04

• Thin Film • Previous Articles     Next Articles

Optimized Drive Control Technology for PVD Coating Vacuum Magnetron Sputtering Equipment

DUAN Zhuoxin   

  1. College of Artificial Intelligence and Computer Science, North China University of Technology, Beijing 100144, China
  • Received:2025-10-31 Online:2026-05-25 Published:2026-06-01

Abstract: Aiming at the problems of low control accuracy and slow response of the transmission system caused by torsional vibration of the transmission chain and magnetic circuit interference in vacuum magnetron sputtering coating equipment, the optimization transmission control technology of PVD coating vacuum magnetron sputtering coating equipment was studied. Based on the vacuum magnetic control area, the vibration transmission target was clarified, which was used as a guide to install damping shock absorbers to suppress external interference and achieve torsional vibration isolation of the transmission chain. In an isolated state, an integrated transmission method is adopted to achieve virtual damping transmission integration by adding an armature to counteract magnetic resistance and establishing scheduling associations on the transmission chain. Adopting a cross closed loop approach, collaborative processing is carried out in the order of transmission integration to achieve the final control task. The experimental results show that the transmission control delay of the coating equipment obtained by the proposed method is basically kept below 0.5 s, and the positioning accuracy of repeated transmission control is improved to 97%, which reflects the enhancement of the transmission control effect and highlights its superior performance.

Key words: PVD coating, vacuum magnetron sputtering, coating equipment, drive optimization, real-time control

CLC Number:  TN305.8

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