基于系统回归模型的真空镀膜设备液冷加热盘设计方法研究*

doi:10.13385/j.cnki.vacuum.2024.04.02

Abstract

Abstract: The design of wafer heating plate has two core performance indicators: uniformity of working surface temperature and temperature control ability, and the wafer heating plates needs to be verified by multiple simulation iterations and tests before the design is finalized to determine that the product performance meets the design requirements. Based on the finite element calculation and system regression model, this study accurately predicts the actual required length, power density and corresponding layout scheme of the heater, and proposes a method to obtain the optimal solution with temperature uniformity as the goal. The verification results of different schemes show that the accuracy of the model is above 98%, which can greatly improve the design efficiency of heating plate and provide the possibilities for the application of artificial intelligence in the field of heating plate design. In addition, based on the theory of heat transfer, a design method for heating plate temperature control ability is proposed, which guides the design of heating plate temperature control ability through one-dimensional calculation.

Key words: semiconductor, vacuum coating equipment, wafer heater, water cooling, regression model, thermal control

CLC Number: TB43

LI Xiang, JIANG Xiao-jiao, ZHAN Chun-ming, LIU Ang, SUN Ning, LI Jia-ping. Research on Design Method of Liquid Cooled Heater for Vacuum Coating Equipment Based on System Regression Model[J].VACUUM, 2024, 61(4): 6-11.

References

[1] 顾雨萍, 李向江, 吴秀梅. 第三代半导体材料发展前景分析[J]. 中国集成电路, 2023, 32(3): 22-25.
[2] 唐林江, 万成安, 张明华, 等. 宽禁带半导体材料SiC和GaN的研究现状[J]. 军民两用技术与产品, 2020,(3): 21-28.
[3] KAZUSHIGE T.半導体次世代キープロセスと新材料:高機能300 mmシリコンウェハの開発動向[J]. 電子材料, 2006, 45(5): 32-37.
[4] KUKUSHKIN S A, OSIPOV A V.Theory and practice of SiC growth on Si and its applications to wide-gap semiconductor films[J]. Journal of Physics D: Applied Physics, 2014, 47(31) : 313001.
[5] 黄鸿宏, 黄洪填, 黄剑彬,等. 真空镀膜综述[J]. 现代涂料与涂装, 2011, 14(6): 22-24.
[6] 孙彬, 刘兴龙, 徐乘远, 等. 真空镀膜助力低碳制造与可持续发展[J].真空, 2023, 60(3):1 2-17.
[7] SCHOLZ S, HUANG Q, THOMSCHKE M.Self-doping and partial oxidation of metal-on-organic interfaces for organic semiconductor devices studied by chemical analysis techniques[J]. Journal of Applied Physics, 2008, 104(10): 104502.
[8] ALHARBI S.Experimental investigation of low-voltage silicon carbide (SiC) semiconductor devices for power conversion applications[D]. University of Denver, 2020.
[9] 陈金灿, 严子浚. 半导体加热器性能的优化分析[J]. 厦门大学学报(自然科学版), 1992(5): 496-499.
[10] SPANNHAKE J, SCHULZ O, HELWIG A.High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials[J]. Sensors, 2006, 6(4): 405-419.
[11] NIKANOROV A, NACKE B, ZEDLER T.Design optimization of induction heater in planetary reactors for semiconductor industry[J]. Applied Mechanics and Materials, 2015, 792:505-510.
[12] PARK J.Modeling, simulation and performance optimization of wideband semiconductor optical amplifiers[D]. Ontario, Canada: McMaster University, 2005.
[13] XU Y, MAO C,HUANG Y.Performance evaluation and multi-objective optimization of a low-temperature CO₂ heat pump water heater based on artificial neural network and new economic analysis[J]. Energy, 2021, 216: 119232.
[14] 廖茂新, 廖基定. 概率论与数理统计[M]. 上海:复旦大学出版社, 2011.
[15] 沈伟刚. 单元式热泵型空调机辅助电加热器功率的选择[J]. 制冷空调与电力机械, 2011, 32(6): 54-57.
[16] 林文贤. 电加热器功率值对带辅助电加热器自然循环太阳能热水系统运行特性的影响[J]. 新能源,1994(11): 21-27.
[17] MONYGOMERY D, PECK E, VINING G.线性回归分析导论[M]. 北京:机械工业出版社, 2016.
[18] 金浩, 高素英. 最佳多元线性回归模型的选择[J].河北工业大学学报, 2002, 31(5): 10-14.
[19] 王宏杰, 陈金灿. 耦合半导体制冷系统性能特性的优化分析[J]. 半导体学报, 2001, 22(7): 938-943.
[20] 姜启源, 谢金星, 叶俊. 数学模型[M]. 5版.北京:高等教育出版社, 2018.
[21] HE Y, CAO C, WU J.Investigations on coupling between performance and external operational conditons for a simiconductor refrigeration system[J]. International Journal of Refrigeration, 2020, 109: 172-179.
[22] 杨世铭, 陶文铨. 传热学[M]. 4版.北京:高等教育出版社, 2006.
[23] 谢振华. 工程流体力学[M]. 5版.北京:冶金工业出版社, 2022.
[24] 毛佳妮, 申丽梅, 李爱博. 半导体制冷器制冷性能的综合影响因素探讨及其优化设计分析[J]. 流体机械, 2010, 38(7): 68-72.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[4]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[5]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[6]	XU Fa-jian, WANG Hai-lei, ZHAO Cai-xia, HUANG Zhi-ting. Application of chemical gases vacuum-compression recovery system in environmental engineering[J]. VACUUM, 2018, 55(5): 29 -33 .
[7]	XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[8]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[9]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[10]	CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping. Reflectance spectroscopy study on TBCs prepared by EB-PVD[J]. VACUUM, 2018, 55(5): 46 -50 .

Research on Design Method of Liquid Cooled Heater for Vacuum Coating Equipment Based on System Regression Model

Abstract

Cite this article

share this article

References

Related Articles 6

Metrics

Comments

Recommended 10

[1]	LI Can-lun, NI Jun, GUO Teng, HAN Wei, WANG Fei, QI Song-song, LI Hui, FAN Xiao-peng, FAN Qiu-lin. Research on Optical Properties of CPI Film Second Surface Mirror [J]. VACUUM, 2024, 61(3): 70-73.
[2]	ZHANG Pi-xian, ZHANG Yi-chen, ZHAN Chun-ming, JIN Wei-da. Application and Development Trend of Dry Vacuum Pump in the Field of Semiconductor and New Energy [J]. VACUUM, 2024, 61(3): 1-8.
[3]	XIANG Yu-chun, ZHU Jian-lei, YUAN Ya. Effect of Oxygen Pressure on the Properties of CuO Films Grown by Pulse Laser Deposition [J]. VACUUM, 2023, 60(3): 42-45.
[4]	YOU Jin-shan. SIS Design and Application for Vacuum Coating Equipment [J]. VACUUM, 2021, 58(5): 80-84.
[5]	CHEN Jia-rong, WANG Dong-chen, PENG Mai-ju. Research on Silicon-Based Tunable External-Cavity Laser [J]. VACUUM, 2021, 58(5): 77-79.
[6]	XIE Yong-qiang, JIN Li-yan, YANG Xiao-dong, WANG Cheng-jun, XIA Dan, SU Chun. Finite Elements Analysis and Optimal Design for the Temperature Field of Vacuum Brazing Furnace [J]. VACUUM, 2021, 58(4): 58-62.