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VACUUM ›› 2021, Vol. 58 ›› Issue (5): 80-84.doi: 10.13385/j.cnki.vacuum.2021.05.14

• Measurement and Control • Previous Articles     Next Articles

SIS Design and Application for Vacuum Coating Equipment

YOU Jin-shan   

  1. Hefei IF Automation Technology Co. , Ltd, Hefei 230000, China
  • Received:2020-03-25 Online:2021-09-25 Published:2021-09-23

Abstract: We studied the characteristics of control system and process safety requirements for vacuum coating equipment, and completed SIL evaluation, SIS design and SIL verification of equipment according to the IEC 62061 standard, completed the integration and application research of the whole SIS, and realized the information interaction and interlock protection between SIS and the main control system. The as-developed SIS has been used in a number of vacuum coating equipment and it effectively protects the safety of people and property.

Key words: vacuum coating equipment, safety loop, SIS, SIL

CLC Number: 

  • TB753+.9
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