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VACUUM ›› 2026, Vol. 63 ›› Issue (3): 83-90.doi: 10.13385/j.cnki.vacuum.2026.03.12

• Vacuum Technology Application • Previous Articles     Next Articles

Application of ZnSe Vacuum Infrared Window Material in Fastener Detection of Composite Robot Thermal Imaging Recognition System

CHEN Dianlong1,2, ZOU Shun2, XV Yang2, WANG Dong2   

  1. 1. Kunming University of Science and Technology, Kunming 650504, China;
    2. China Yangtze Power Co., Ltd., Yichang 443002, China
  • Received:2025-09-15 Online:2026-05-25 Published:2026-06-01

Abstract: To address the high-precision defect detection requirements of fasteners in vacuum equipment used in aerospace and nuclear power systems, this study evaluates the adaptability of ZnSe infrared window materials in terms of thermal stability, optical performance, and outgassing control. A correlation model between material properties and defect-recognition performance was established by integrating optical analysis in the 8-12 μm band with thermodynamic and vacuum-outgassing modeling, thereby quantifying the factors affecting imaging quality. A vacuum experimental platform was developed to simulate thermal cycling, particle impacts, and long-term outgassing conditions, and the performance of ZnSe was compared with that of Ge and AMTIR-1 materials. The results show that ZnSe exhibits a vacuum transmittance of 75%, a signal-to-noise ratio (SNR) of 45-50 dB, and an edge sharpness of ≤3 pixels. The defect-recognition accuracy reached 93-95%, with false-detection and missed-detection rates of ≤3% and ≤2%, respectively. After 500 hours of operation and 100 thermal cycles, the transmittance decreased by only 0.8%, with no cracking observed, and the outgassing rate remained ≤5×10-9 Pa·L/(s·cm2), ensuring excellent sealing stability. These results demonstrate that ZnSe possesses superior vacuum infrared imaging performance and environmental adaptability, making it well suited for composite robotic thermal-imaging recognition systems and providing essential material support for high-vacuum inspection equipment.

Key words: ZnSe infrared window, thermal imaging recognition system, vacuum environment, fastener defect detection, vacuum adaptability

CLC Number:  TN219

[1] 徐照英,苏永要,张腾飞,等. 钛合金紧固件表面掺钛类金刚石薄膜的微观结构和磨损性能[J].稀有金属材料与工程,2025,54(4):993-1001.
[2] HUANG Y L, ZHOU H, WANG F J, et al.Biomimetic moth-eye nanostructures fabricated by nanosphere lithography in ZnSe enhancing transmission in the mid-infrared[J]. Optical Materials, 2023, 141: 113971.
[3] 杨国健,孙鹏,王跃忠,等. 数值模拟超高密度热流下红外窗口材料的受热冲击[J].硅酸盐学报,2024,52(3):862-873.
[4] 王福贞. 磁控溅射镀膜技术新进展[J].真空与低温,2025,31(5):543-555.
[5] HUANG L H, ZHANG W B, WEI Y X, et al.Flexible Ge/Cu/ZnSe multilayer photonic structures for triple-band infrared camouflage, visible camouflage, and radiative cooling[J]. Optics Express, 2024, 32(21): 37295-37309.
[6] 邱超,翟思婷,吴柯萱,等. 真空条件下低温红外辐射测量技术研究[J].应用光学,2020,41(4):730-736.
[7] BERGUM K, FJELLVÅG H, NILSEN O. Thickness dependent structural, optical and electrical properties of Ti-doped ZnO films prepared by atomic layer deposition[J]. Applied Surface Science, 2015, 332: 494-499.
[8] DAHIYA A, CHUHADIYA S, HIMANSHU, et al. Achieving phase stability in ZnSe thin films by thickness and annealing recipes for optical window applications[J]. Journal of Materials Science: Materials in Electronics, 2023, 34(5): 410.
[9] 王丽荣,石澎. 硅在红外光学薄膜中的应用研究[J].真空,2013,50(1):31-33.
[10] YANG G J, PENG Z Y, WANG Y Z, et al.Numerical study of thermal shock on infrared windows and their composites with diamond coatings under harsh conditions[J]. Diamond and Related Materials, 2023, 137: 110117.
[11] ZHENG J F, ZHANG G Q, ZHANG W Q, et al.Generation mechanism of optical surface in ultra-precision cutting polycrystalline zinc selenide[J]. Applied Surface Science, 2024, 676: 161005.
[12] 郭志帅,费书国,阴晓俊,等. 红外测温成像系统光学薄膜滤光片设计与镀制工艺研究[J].真空,2020,57(6):18-22.
[13] 关玉慧,宋洪,董海义,等.常见放气率测试方法的量化比较[J].真空科学与技术学报,2020,40(6):524-530.
[14] 宋健,郝小鹏,丁雷,等.真空低背景红外高光谱亮温计量标准装置研制[J].红外与激光工程,2019,48(10):26-32.
[15] 聂怀乐,毛珊,赵建林.制冷型折衍混合双波段红外光学系统无热化设计[J].光学学报,2023,43(8):383-391.
[16] GUPTA N, SONG J.Improving transmittance of long-wave infrared guided-mode resonant filters[J]. Optical Engineering, 2023, 62(3): 035102-035102.
[17] 张文军,张辉辉,武涛,等. 基于红外热像的故障诊断算法及系统设计[J].煤炭科学技术,2009,37(11):73-76,124.
[18] CHASTA G, HIMANSHU, PATEL S L, et al. Analysis of different vacuum annealing levels for ZnSe thin films as potential buffer layer for solar cells[J]. Journal of Materials Science: Materials in Electronics, 2022, 33(1): 139-157.
[19] 么艳平,刘景和. ZnSe红外窗口材料的性能及其制备[J].人工晶体学报,2006,(1):183-187.
[20] BORRMANN D, NÜCHTER A, ÐAKULOVIĆ M, et al. A mobile robot based system for fully automated thermal 3D mapping[J]. Advanced Engineering Informatics, 2014, 28(4): 425-440.
[21] BHUPATHI S, WANG S C, WANG G Y, et al.Porous vanadium dioxide thin film-based Fabry-Perot cavity system for radiative cooling regulating thermochromic windows: experimental and simulation studies[J]. Nanophotonics, 2024, 13(5): 711-723.
[22] CALVIN SAMUEL S, ARIVARASU M, RAM PRABHU T.High-Temperature solid particle erosion behavior of laser powder bed fused Inconel 718[J]. Journal of Tribology, 2022, 144(9): 091705.
[23] 李得天,郭美如,葛敏,等.固定流导法真空漏孔校准装置[J].真空科学与技术学报,2006,(5):358-362.
[24] XU J, LI T, ZHANG H, et al.Simulation study of the thermal insulation performance of a vacuum-insulated tube inside an electrically heated device[J]. The Canadian Journal of Chemical Engineering, 2023, 101(10): 6032-6044.
[25] 杜春林,秦家勇,王宇辰,等.真空低温环境下碳泡沫吸波材料电磁性能测试研究[J].真空科学与技术学报,2025,45(4):326-331.
[26] CHEN Q F, LIANG G Z.Numerical investigation on particle erosion characteristics of the elbow pipe in gas-steam ejection power system[J]. Aerospace, 2022, 9(11): 635.
[27] AGUILAR CARDENAS M, KENDRICK C, HEYWOOD M, et al.Feasibility study of developing hollow-core vacuum insulated panels[J]. Journal of Building Physics, 2024, 47(4):386-420.
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