欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2020, Vol. 57 ›› Issue (3): 37-41.doi: 10.13385/j.cnki.vacuum.2020.03.09

• Measurement and Control • Previous Articles     Next Articles

Treatment of Inner Surface of Guide Sleeve with Inner Diameter of20mm: Discharge Characteristics of Mixed Gas Hollow Cathode

MA Yu-shan1, CHANG Zhan-dong1, LIU Hai-bo1, JIA Hua1, YUE Ling1, XU Xi-long1, GONG Chun-zhi2*, Tian Xiubo2   

  1. 1. Wuzhong Instrument Co., Ltd., Wuzhong 751100, China;
    2. State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
  • Received:2019-05-05 Published:2020-06-18

Abstract: Aiming at the DLC treatment of inner surface of 20mm guide sleeve of high-end valve, the effects of pulse voltage, pulse width, frequency and working pressure on the volt-ampere characteristics of hollow cathode discharge in tube under argon and mixed atmosphere were studied by using high frequency and high voltage pulse power supply. The results show that the hollow cathode discharge is realized in the five axially aligned tubes. The discharge current under argon condition shows obvious characteristics of hollow cathode discharge, while the current amplitude under mixed gas condition is relatively flat. The increase of pulse voltage or pressure is beneficial to the increase of discharge current, while the increase of pulse frequency decreases the peak current slightly, and the increase of pulse width increases the peak current gradually under the pure argon condition, but has little effect on the peak current under other mixed conditions, only increases the average current. Under fixed pressure of 10 Pa, the change of acetylene flow rate has little effect on discharge current, which is beneficial to enlarge the process window range of DLC film deposition. The above results may provide a technological basis for the preparation of DLC film on inner wall of small diameter guide sleeve of high-end valves.

Key words: valve, inner surface DLC, hollow cathode, mixed gas

CLC Number: 

  • TB71+6
[1] Zheng Z J, Ou G F, Ye H J, et al.Investigation on failure process and structural optimization of a high-pressure letdown valve[J]. Engineering Failure Analysis, August, 2016(66): 223-239.
[2] 李胜亭. 神华煤直接液化项目阀门管道冲蚀磨损及处理措施[J]. 内蒙古石油化工, 2016(7): 36-42.
[3] 偶国富, 饶杰, 章利特, 等. 煤液化高压差调节阀空蚀/冲蚀磨损预测[J]. 摩擦学学报, 2013, 33(2): 155-161.
[4] 张宏, 熊诗波, 梁义维, 等. 液压阀冲蚀磨损特性分析与结构探讨[J]. 煤炭学报, 2008, 33(2): 214-217.
[5] 崔忠圻. 金属学与热处理[M]. 北京: 机械工业出版社, 1999: 315.
[6] 黄可, 马廷灿. 日本NEDO 先进制造研究项目概要[J]. 科学新闻, 2008:12-14.
[7] 高立. 橡树岭的表面改性中心[J]. 国外核新闻, 1993(4):17-18.
[8] Parsi M, Najmi K, Najafifard F, et al.A comprehensive review of solid particle erosion modeling for oil and gas wells and pipelines applications[J]. Journal of Natural Gas Science and Engineering, 2014, 21: 850-873.
[9] 王勇, 张耀锋, 尉伟, 等. 不锈钢管道溅射镀TiN薄膜实验研究[J]. 中国科学技术大学学报. 2007, 37(4-5): 509-513.
[10] 金凡亚, 王珂, 赵嘉学, 等. 内表面等离子体增强化学气相沉积TiN涂层研究[J]. 金属热处理. 2008, 33(8): 93-95.
[11] 石昌仑, 张敏, 林国强. 脉冲偏压对电弧离子镀深管内壁沉积TiN 薄膜的影响[J]. 真空科学与技术学报. 2007, 27(6): 517-521.
[12] 尹利勇, 温小琼, 王德真. 细长金属管内产生的直流辉光等离子体发射光谱诊断[J]. 光谱学与光谱分析, 2008, 28(12): 2745-2748.
[13] Lusk D, Gore M, Boardman W, et al.Thick DLC films deposited by PECVD on the internal surface of cylindrical substrates[J]. Diamond & Related Materials, 2008, 17: 1613-1621.
[14] Wei R .Development of new technologies and practical applications of plasma immersion ion deposition(PIID)[J]. Surface & Coatings Technology, 2010, 204(18):2869-2874.
[15] 吴明忠, 田修波, 李慕勤, 等. 笼网型空心阴极氩气放电特性研究[J]. 真空科学与技术学报, 2015, 35(3): 323-329.
[1] YUE Ling, SHI Yue-juan, MA Yu-shan, LIU Hai-bo, ZHOU Yong-xing, ZHANG Ming-ming, GONG Chun-zhi, TIAN Xiu-bo. Treatment of Inner Surface of Guide Sleeve with Inner Diameter of 20mm(1): Characteristics of Argon Hollow Cathode Discharge [J]. VACUUM, 2020, 57(2): 53-57.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd