氮化碳薄膜的光电特性研究*

doi:10.13385/j.cnki.vacuum.2020.03.08

Abstract

Abstract: Using high purity graphite as target, Ar and N₂ as sputtering and reacting gases, a series of CN thin films with different N content were prepared by DC magnetron sputtering. The composition, morphology, transmittance and electrical resistivity of the films were detected by means of XRD, SEM, spectrophotometer and high impedance meter. The results show that the CN film has the first crystal shape, and with the increase of N₂ content in the sputtering chamber, the content of N in the film increases first and then decreases finally to the stable state. The resistivity of the film is maintained within the range of 10^-5Ω·cm to 10¹⁵Ω.cm and the transmittance is basically maintained between 85% and 91%. The incorporation of N played a stabilizing role in the sp3 hybrid C in the films.

Key words: sp3 hybrids, transmittance, resistivity, crystal type

CLC Number:

TQ174

SHEN Hong-xue, LI Gang, YAO Ting-ting, JIN Bao-qi, JIN Ke-wu, WANG Tian-qi. Study on the Photoelectric Properties of N Doped CN Thin Films[J].VACUUM, 2020, 57(3): 34-36.

References

[1] Liu A Y, Cohen M L.Prediction of New Low Compressibility Solid[J]. Science, 1989,245:841-842.
[2] Liu A Y, Cohen M L.Structural Properties and Electronic Structure of Low-Compressibility Material β-Si₃N₄ and β-C₃N₄[J].Phy s Rev,1990,B41:10727-10734.
[3] Teter D M, Hemley R J.Low-Comp-ressibility Carbon Nitrides[J] .Science, 1996,271:53-55.
[4] Yu K M, Cohen M L, Hailer E E, et al.Observation of Crystalline C₃N₄[J]. Phys Rev B, 1994, 49(7) : 5034-5037.
[5] Cao S W, Yu J G. g-C₃N₄-Based Photocatalysts for Hydrogen Generation[J].Phys,Chem.Lett,2014,5(12): 2101-2107.
[6] Han Q,Wang B,Gao J,et al.Atomically Thin Mesoporous Nanomesh of Graphitic C₃N₄ for High-Efficiency Photocatalytic Hydrogen Evolution[J].ACSNano2016,10(2): 2745-2751.
[7] Jiang W, Luo W, Wang J, et al.Enhancement of catalytic activity and oxidative ability for graphitic carbon nitride[J].Photochem Photobiol, C 2016, 28: 87-115.
[8] 魏爱香,陈弟虎,彭少麒,无定形金刚石膜的光学性质[J].材料研究学报,1997,11(1):81-84.
[9] Yoon S F, Tan K H, Rusli,et al. Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition[J]. Journal of Applied Physics,2001,89:4830-4835.
[10] Melissa J.Paterson.An investigation of the role of hydrogen in ion beam deposited a-C:H[J].Diamond and Related Materials, 1998,7:908-915.
[11] 乔学亮,孙增辉,程宇航,等,N含量对CN薄膜折射率的影响[J].硅酸盐学报,2003(31):465-469.

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Study on the Photoelectric Properties of N Doped CN Thin Films

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