VACUUM ›› 2022, Vol. 59 ›› Issue (5): 14-19.doi: 10.13385/j.cnki.vacuum.2022.05.03
• Thin Film • Previous Articles Next Articles
WU Shuai1, LIU Shuang1, QIN Li-zhao1, ZHANG Xu2, ZHANG Tong-hua1, LIAO Bin2, WANG Ke-ping3
CLC Number:
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