温度对石墨烯真空标准漏孔漏率的影响研究*

doi:10.13385/j.cnki.vacuum.2024.02.06

Abstract

Abstract: Graphene vacuum standard leak is a kind of new vacuum standard leak based on graphene-derived materials, and the lower limit of leakage rate is lower than the general helium permeation leak rate, which can be used in the calibration of ultra-sensitive leak detection system. Based on the material characteristics of graphene, the leakage rate of graphene vacuum standard leak will change with temperature. In this paper, the influence of temperature on the leakage rate of graphene vacuum standard leak was studied. By measuring the leakage rate of the standard leak in different temperature environments, the temperature coefficient and the change rule of the leakage were obtained. The results show that the leakage rate of graphene vacuum standard leak changes linearly with temperature, and the temperature coefficient is lower than 2.5%/℃.

Key words: graphene, standard leak, ultra-sensitive leak detection, temperature coefficient

CLC Number: TB77

LIU Chu-yan, LIU Zhao-xian, REN Guo-hua, HAN Yan, SUN Li-chen, YAN Rong-xin, MENG Dong-hui. Effect of Temperature on the Leakage Rate of Graphene Vacuum Standard Leak[J].VACUUM, 2024, 61(2): 37-41.

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Effect of Temperature on the Leakage Rate of Graphene Vacuum Standard Leak

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