一种空间微型质谱仪的芯片级离子源研究*

doi:10.13385/j.cnki.vacuum.2024.02.07

Abstract

Abstract: A chip-level ion source structure with a triode-type field emitter is designed for the micro mass spectrometer of spacecraft, which consists of a gas ionization by electron impact and an ion extraction section. The structure of the ion source is composed of five layers of electrodes. A chip-level ion source prototype was prepared using MEMS technology, and the electron flow, ion flow and stability were tested. The results show that the chip-level ion source can generate an electron current of over 0.357 mA, and the received ion current can reach 527 pA, meeting the functional requirements of the ion source for micro mass spectrometers in space exploration missions.

Key words: MEMS, ion source, deep space exploration, mass spectrometer of spacecraft

CLC Number: TB774

DOU Ren-chao, CUI Yu-hao, YU Xin-fa, FENG Qi, LIU Kun, YAN Rong-xin, SUN Li-chen, MENG Dong-hui. Research on a Chip Level Ion Source for a Micro Mass Spectrometer of Spacecraft[J].VACUUM, 2024, 61(2): 42-46.

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Research on a Chip Level Ion Source for a Micro Mass Spectrometer of Spacecraft

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