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Microstructure and Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering
LI Can-min, DONG Zhong-lin, XIA Zheng-wei, ZHANG Xin-feng, WEI Rong-hua
VACUUM. 2024, 61 (2):
10-15.
DOI: 10.13385/j.cnki.vacuum.2024.02.02
Plasma enhanced magnetron sputtering (PEMS) method was used to deposit TiCrSiCN and TiCrSiCON nanocomposite coatings using trimethylsilane (Si-C) and hexamethyldisiloxane (Si-C-O) precursors on H13 steel. The influences of oxygen on the microstructure, phases, surface energy, hardness,friction coefficient,wear resistance and high-temperature oxidation properties of the coatings were studied by SEM, AFM, XRD, EDS, etc. The results show that the oxygen-containing TiCrSiCON coating shows a rougher surface with a looser microstructure and typical columnar feature, compared with the oxygen-free TiCrSiCN coating. As a result, the surface energy of the oxygen-containing coating is higher than the oxygen-free coating. The addition of oxygen improves the hardness of the nanocomposite coating, thereby significantly enhancing the anti-wear property of the coating. As for the coefficient of friction, there is no obvious difference between TiCrSiCN and TiCrSiCON coatings. The Cr and O in the TiCrSiCON coating could form a dense oxide film which can improve its high-temperature oxidation property.
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