Abstract: Mass spectrometer is an important instrument for gas monitoring analysis in many fields. It has the advantages of wide detection range, high sensitivity and faster response speed compared to the traditional gas sensor. A miniaturized process mass spectrometer is developed with a dual filament electron bombardment ionization source and a quadrupole as mass analyzer. The detector works in dual mode of Faraday cup and electron multiplier. The electronic control unit core is combined with a high frequency FPGA system, high current filament power supply, wide mass range RF power supply and high gain composite transconductance amplifier. The test results show that the miniaturized process mass spectrometer has superior properties which has reached the level of mainstream mass spectrometer in the market, and can be widely used in various gas detection occasions.

Key words: process detection, mass spectrometer, quadrupole rod, resolution