VACUUM ›› 2022, Vol. 59 ›› Issue (3): 41-45.doi: 10.13385/j.cnki.vacuum.2022.03.09
• Thin Film • Previous Articles Next Articles
FU Xue-cheng, WU Li-ying, LUAN Zhen-xing, MAO Hai-ping, WANG Ying
CLC Number:
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