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VACUUM ›› 2021, Vol. 58 ›› Issue (6): 27-32.doi: 10.13385/j.cnki.vacuum.2021.06.05

• Thin Film • Previous Articles     Next Articles

Mechanism Analysis and Control of Material Splashing in the Deposition of Gold Film by using Glassy Carbons Crucible

FU Xue-cheng, MAO Hai-ping, QU Min-ni, WU Li-ying, WANG Ying   

  1. Advanced Electronics Materials and Devices,Shanghai Jiao Tong University,Shanghai 200240,China
  • Received:2020-10-10 Online:2021-11-25 Published:2021-11-30

Abstract: When glassy carbons crucible and electron beam evaporation equipment are used for coating, with the consumption of gold material, more particles on the surface of gold film are obtained at the same deposition rate, which seriously affects the flatness and local uniformity of the film. In this work, the phenomenon was explained by the theory that the corona discharge of spherical droplet on the crucible wall caused by thermally electron emission from liquid metal surface led to material splashing.At the same deposition rate, two kinds of gold films were obtained by changing the volume proportion of gold materials in the crucible, and their surface morphology and infrared spectral transmission properties were compared and analyzed. The results showed that when the material volume accounted for about 26% of the crucible volume, there were many black particles on the gold film surface, which were approximately spherical or ellipsoidal in shape, and the main component is still gold. When the material volume accounted for about 26% of the crucible volume,there were no black particles on the gold film surface, and the infrared spectral transmittance is 5% lower than the former.

Key words: electron beam evaporation, glassy carbons crucible, gold film, tip discharge

CLC Number: 

  • TB43
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