TiAlN硬质薄膜的制备工艺及结构性能研究进展*

doi:10.13385/j.cnki.vacuum.2024.02.05

Abstract

Abstract: As the most promising TiN film substitute material, TiAlN film has excellent properties such as high hardness, low friction coefficient, good high temperature stability and corrosion resistance. The TiAlN hard films are widely used in the fields petroleum, tools, molds, electric power and aircraft engines. The current application and research progress of domestic and foreign TiAlN films, the preparation methods, and the effects of process parameters on structure and properties of TiAlN films are summarized. The performance of TiAlN film is comprehensively introduced, the method to optimize the performance of TiAlN film is pointed out, and the research and application direction of TiAlN films are prospected. The TiAlN film will develop towards the multiple composite, multilayer structure, and nano multi-layer structure with the further research and the demand of application.

Key words: TiAlN film, preparation, structure, property

CLC Number: TG115.58;TB43

XU Zhao-ying, ZHANG Teng-fei, WANG Jin-biao, CHEN Qiao-wang. Research Progress in Preparation Process and Structure Properties of TiAlN Films[J].VACUUM, 2024, 61(2): 29-36.

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Research Progress in Preparation Process and Structure Properties of TiAlN Films

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