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真空 ›› 2020, Vol. 57 ›› Issue (2): 27-32.doi: 10.13385/j.cnki.vacuum.2020.02.06

• 薄膜 • 上一篇    下一篇

关于(Ti,Cr)N膜摩擦学性能的研究*

钟利, 沈丽如, 陈美艳, 刘彤, 但敏, 金凡亚   

  1. 核工业西南物理研究院,四川 成都 610207
  • 收稿日期:2019-02-15 出版日期:2020-03-25 发布日期:2020-04-24
  • 通讯作者: 沈丽如,研究员。
  • 作者简介:钟利(1987-),女,四川省井研县人,博士生。
  • 基金资助:
    *四川省科技计划项目资助(2018GZ0210);国防基础科研计划项目(JCKY2017205B074)

Study on Tribological Properties of (Ti, Cr) N Films

ZHONG Li, SHEN Li-ru, CHEN Mei-yan, LIU Tong, DAN Min, JIN Fan-ya   

  1. Southwestern Institute of Physics, Chengdu 610207, China
  • Received:2019-02-15 Online:2020-03-25 Published:2020-04-24

摘要: 为了研究多弧离子镀技术中所用靶材与薄膜成分比例的关系,并对比不同成分比例的(Ti,Cr)N膜的摩擦学性能, 设计制备了纯Ti靶、纯Cr靶及钛铬比分别为 9:1、4:1和1:1的钛铬合金靶共5种靶材进行镀膜试验。利用扫描电子显微镜观察薄膜微观形貌,利用X射线能谱分析仪对微区成分进行定性和半定量分析,利用X射线衍射分析薄膜结构,通过摩擦磨损试验测试薄膜的耐磨性,最终以磨痕宽度、磨痕深度和磨痕长度来计算磨损体积,以磨损体积表征不同膜的耐磨性能。测试结果表明,合金靶制备的薄膜中成分比例并不与靶材中的成分配比一致,但均具有TiCrN(200)择优取向。纯靶制备的薄膜表面最为细腻,TiCrN膜的粗糙度随Cr含量的提高而降低。TiCrN膜的硬度和耐磨性明显优于纯靶制备的薄膜,在靶材配比Ti:Cr=4:1时制备的Ti0.3Cr0.23N薄膜硬度最高(HV0.05 3274.9)、耐磨性能最好。以合金靶制备复合薄膜时,薄膜中的成分比例受单一金属离化率的影响较大,受靶材中金属配比的影响较小;在薄膜中添加硬质元素可以改善膜的质量、提高耐磨性能。

关键词: 多弧离子镀技术, 合金靶材, TiCrN复合薄膜, 耐磨性能

Abstract: In order to study the relationship between composition of composite film and target used in multi-arc ion plating technology, and to compare the tribological properties of (Ti, Cr) N film with different composition, five targets - namely pure Ti target, pure Cr target and titanium-chromium alloy targets with titanium-chromium ratio of 9:1, 4:1 and 1:1 were designed and fabricated. Scanning electron microscopy was used to observe the micro-morphology of the film. X-ray energy spectrum analyzer was used to analyze the composition of the micro-area qualitatively and semi-quantitatively. X-ray diffraction was used to analyze the structure of the film. The wear resistance of the film was tested by friction and wear tests. Finally, the wear volume was calculated with the width, depth and length of the wear marks, and the wear volume was used to characterize the wear resistance of different films. The results show that composition of film prepared by the alloy target is not the same as that of the target, but all of them show TiCrN(200)preferred orientation. The surface of TiCrN film prepared by pure target is the most delicate and the roughness of TiCrN film decreases with the increase of Cr content. The hardness and wear resistance of TiCrN films are obviously better than those of pure target films. Ti0.3Cr0.23N films prepared by target(Ti:Cr=4:1)have the highest hardness(HV0.053274.9)and the best wear resistance. When the film is prepared by alloy target, the composition of the film is greatly affected by the ionization rate of single metal, not the metal ratio of the target. And adding hard elements to the film can improve the quality and wear resistance of the film.

Key words: multi-arc ion plating technology, alloy target, TiCrN film, wear resistance

中图分类号: 

  • TG144
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