聚变堆第一壁材料溅射装置真空系统设计研究*

doi:10.13385/j.cnki.vacuum.2021.05.04

真空 ›› 2021, Vol. 58 ›› Issue (5): 32-36.doi: 10.13385/j.cnki.vacuum.2021.05.04

聚变堆第一壁材料溅射装置真空系统设计研究^*

王俊儒^1,2, 余耀伟¹, 曹斌¹, 庄会东¹, 胡建生¹

1.中国科学院合肥物质科学研究院等离子体物理研究所,安徽合肥 230031;
2.中国科学技术大学,安徽合肥 230026

收稿日期:2020-09-27 出版日期:2021-09-25 发布日期:2021-09-23
通讯作者: 胡建生,国家杰青,研究员。余耀伟,副研究员。
作者简介:王俊儒（1993-）,男,黑龙江省齐齐哈尔市人,博士。
基金资助:
*中科院重大科技基础设施开放研究项目（长脉冲运行中实时抑制钨表面溅射的实验研究）、国家重点研发项目（2017YFE0301100）资助

Design and Research on the Vacuum System of Material Sputtering Experimental Device for the Fusion First Wall Material

WANG Jun-ru^1,2, YU Yao-wei¹, CAO Bin¹, ZHUANG Hui-dong¹, HU Jian-sheng¹

1. Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, efei 230031, China;
2. University of Science and Technology of China, Hefei 230026, China

Received:2020-09-27 Online:2021-09-25 Published:2021-09-23

摘要/Abstract

摘要： 直线等离子体装置（Linear Plasma Device,LPD）是研究托卡马克上边界等离子体与材料相互作用的重要平台。本文针对新建LPD的真空系统设计研制开展了相关研究。该真空系统设计为两级隔断式结构,等离子体放电和材料预处理可以在各自真空腔室同步进行、互不干扰。通过真空测试实验,真空控制系统运行稳定,短时间烘烤后系统极限真空达1.4×10^-5Pa,满足LPD对洁净真空环境的要求。

关键词: 材料溅射实验装置, 材料辐照, 真空系统, 抽速

Abstract: Linear plasma device(LPD) is an important platform for studying plasma and wall material interaction. It was presented that the design and test of vacuum system for a new LPD device, called material sputtering experimental device(MSED). The vacuum vessel is divided into two parts of plasma discharge vessel and material pretreatment vessel. The related experiments could be carried out in their own vessel without affecting each other. The test experiment is carried out by the new vacuum control system. The results show that the limit vacuum is 1.4×10^-5 Pa after a baking cycle, which meets the design requirements. The material samples could be transferred with the maximum distance of ~ 1800 mm. The stable and reliable operation of the vacuum system is benefit to the achievement of ultra-clean vacuum.

Key words: material sputtering experimental device, material exposure, vacuum system, pumping speed

中图分类号:

TL62+8

王俊儒, 余耀伟, 曹斌, 庄会东, 胡建生. 聚变堆第一壁材料溅射装置真空系统设计研究^*[J]. 真空, 2021, 58(5): 32-36.

WANG Jun-ru, YU Yao-wei, CAO Bin, ZHUANG Hui-dong, HU Jian-sheng. Design and Research on the Vacuum System of Material Sputtering Experimental Device for the Fusion First Wall Material[J]. VACUUM, 2021, 58(5): 32-36.

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聚变堆第一壁材料溅射装置真空系统设计研究^*

Design and Research on the Vacuum System of Material Sputtering Experimental Device for the Fusion First Wall Material

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