FCVAD技术制备CrCN薄膜的热稳定性研究

doi:10.13385/j.cnki.vacuum.2022.05.03

真空 ›› 2022, Vol. 59 ›› Issue (5): 14-19.doi: 10.13385/j.cnki.vacuum.2022.05.03

FCVAD技术制备CrCN薄膜的热稳定性研究

吴帅¹, 刘爽¹, 覃礼钊¹, 张旭², 张同华¹, 廖斌², 王可平³

1.西南大学材料与能源学院,重庆 400715;
2.北京师范大学射线束技术与材料改性教育部重点实验室,北京 100875;
3.金猫纺织器材有限公司,重庆 400715

收稿日期:2022-01-14 出版日期:2022-09-25 发布日期:2022-09-28
通讯作者: 覃礼钊,副教授。
作者简介:吴帅（1995-）,男,四川省广安市人,硕士生。
基金资助:
*2018年重庆市技术创新与应用示范（产业类）重点研发项目（cstc2018jszx-cyzdX0093）; 重庆市技术创新与应用发展（面上项目）（cstc2020jscx-msxm1818）

Study on Thermal Stability of CrCN Films Prepared by FCVAD Technology

WU Shuai¹, LIU Shuang¹, QIN Li-zhao¹, ZHANG Xu², ZHANG Tong-hua¹, LIAO Bin², WANG Ke-ping³

1. Department of Materials and Energy, Southwest University, Chongqing 400715, China;
2. Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University,Beijing 100875, China;
3. Jinmao Textile Equipment Co., Ltd., Chongqing 400715, China

Received:2022-01-14 Online:2022-09-25 Published:2022-09-28

摘要/Abstract

摘要： 磁过滤真空阴极弧沉积（FCVAD）技术制备的CrCN薄膜具有优异的机械性能,可作为表面改性膜应用于纺织器材、pcb钻头和活塞环中。本文针对薄膜因摩擦产生高温或应用环境温度高,其结构和性能将发生变化的情况,研究了CrCN薄膜的热稳定性。通过X射线衍射（XRD）、场发射扫描电子显微镜（FESEM）、拉曼光谱（Raman）和X射线光电子能谱（XPS）对常温至800℃下薄膜的结构进行了表征。结果显示：FCVAD技术制备的CrCN薄膜热稳定上限温度约为400℃。温度在400℃以下时,CrCN薄膜结构稳定,保持无序状态;当温度达到500℃时,薄膜表面出现细小晶粒,薄膜中的CrN相转化为Cr₂N相;随着温度继续升高,CrCN固溶相开始石墨化,薄膜内晶粒尺寸变大;当温度大于700℃时,薄膜中的碳以CO或CO₂的形式脱离薄膜,Cr元素以Cr₂O₃相的形式存在,并在800℃长成尺寸约400nm的晶粒。

关键词: FCVAD技术, CrCN薄膜, 热稳定性

Abstract: CrCN films prepared by magnetic filtration cathodic arc deposition（FCVAD）technology have excellent mechanical properties and can be used as surface modified films in textile equipment, pcb drill bits and piston rings. In this paper, the thermal stability of CrCN films was investigated for the situation that the structure and properties of films will change due to high temperature caused by friction or high temperature of application environment. Structure of the films from room temperature to 800℃ was characterized by X-ray diffraction（XRD）, field emission scanning electron microscopy（FESEM）, Raman spectroscopy（Raman）, and X-ray photoelectron spectroscopy（XPS）. The results show that the upper limit of thermal stability of CrCN films prepared by FCVAD technique is about 400℃. When the temperature is below 400℃, the structure of CrCN films is stable and remains disordered. When the temperature reaches 500℃, fine grains appear on the surface of the films, and the CrN phase in the films is transformed into Cr₂N phase. As the temperature continues to increase, the CrCN solid solution phase starts to graphitize, and the grain size within the films becomes larger. When the temperature is greater than 700℃, carbon in the films leaves in the form of CO or CO₂, and Cr element exists in the form of Cr₂O₃ phase and grows into grains with a size of about 400nm at 800℃.

Key words: FCVAD technology, CrCN thin film, thermal stability

中图分类号:

TG156.21

吴帅, 刘爽, 覃礼钊, 张旭, 张同华, 廖斌, 王可平. FCVAD技术制备CrCN薄膜的热稳定性研究[J]. 真空, 2022, 59(5): 14-19.

WU Shuai, LIU Shuang, QIN Li-zhao, ZHANG Xu, ZHANG Tong-hua, LIAO Bin, WANG Ke-ping. Study on Thermal Stability of CrCN Films Prepared by FCVAD Technology[J]. VACUUM, 2022, 59(5): 14-19.

参考文献

[1] BATKOVÁ Š, ČAPEK J, REZEK J, et al. Effect of positive pulse voltage in bipolar reactive HiPIMS on crystal structure,microstructure and mechanical properties of CrN films[J]. Surface and Coatings Technology, 2020, 393: 125773.
[2] FERREIRA R, CARVALHO S, SOBRAL L, et al.Influence of morphology and microstructure on the tribological behavior of arc deposited CrN coatings for the automotive industry[J]. Surface and Coatings Technology, 2020, 397: 126047.
[3] CHEN H Y, YANG W H.Chromium nitride thin films prepared using atmospheric pressure plasma process[J]. Thin Solid Films, 2020, 706: 138095.
[4] 王静, 张广安, 王立平. 金属复合对CrN薄膜的结构及摩擦磨损性能的影响[J]. 润滑与密封, 2008, 33(5): 30-32.
[5] POLCAR T, VITU T, CVRCEK L, et al.Effects of carbon content on the high temperature friction and wear of chromium carbonitride coatings[J]. Tribology International, 2010, 43(7): 1228-1233.
[6] GUAN J J, WANG H Q, QIN L Z, et al.Phase transitions of doped carbon in CrCN coatings with modified mechanical and tribological properties via filtered cathodic vacuum arc deposition[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2017, 397: 86-91.
[7] ALMER J, ODÉN M, HÅKANSSON G. Microstructure and thermal stability of arc-evaporated Cr-C-N coatings[J]. Philosophical Magazine, 2004, 84(7): 611-630.
[8] WARCHOLINSKI B, GILEWICZ A, KUKLINSKI Z, et al.Hard CrCN/CrN multilayer coatings for tribological applications[J]. Surface and Coatings Technology, 2010, 204(14): 2289-2293.
[9] MYŚLIŃSKI P, SZPARAGA Ł, GILEWICZ A, et al. Investigations of the thermo-mechanical stability of hybrid layers for tribological applications: nitrided layer/CrCN coating system[J]. Vacuum, 2018, 148: 276-285.
[10] POLCAR T, CVRČEK L, ŠIROKY P, et al. Tribological characteristics of CrCN coatings at elevated temperature[J]. Vacuum, 2005, 80: 113-116.
[11] BAHCE E, CAKIR N.Tribological investigation of multilayer CrN/CrCN/TaN films deposited by close field unbalanced magnettron sputtering[J]. Reviews on Advanced Materials Science, 2019, 58(1): 271-279.
[12] KRELLA A K, CZYZNIEWSKI A, GILEWICZ A, et al.Experimental study of the influence of deposition of multilayer CrN/CrCN PVD coating on austenitic steel on resistance to cavitation erosion[J]. Coatings, 2020, 10(5): 487.
[13] YE Y W, WANG Y X, WANG C T, et al.An analysis on tribological performance of CrCN coatings with different carbon contents in seawater[J]. Tribology International, 2015, 91: 131-139.
[14] LIU H T, LI L H, GU J B, et al.Research on unusual cathode erosion patterns in the process of filtered cathodic vacuum arc deposition[J]. The International Journal of Advanced Manufacturing Technology, 2018, 96: 1779-1785.
[15] GILEWICZ A, WARCHOLINSKI B.Tribological properties of CrCN/CrN multilayer coatings[J]. Tribology International, 2014, 80: 34-40.
[16] YE Y W, WANG Y X, CHEN H, et al.Doping carbon to improve the tribological performance of CrN coatings in seawater[J]. Tribology International, 2015, 90: 362-371.
[17] GILEWICZ A, CHMIELEWSKA P, MURZYNSKI D, et al.Corrosion resistance of CrN and CrCN/CrN coatings deposited using cathodic arc evaporation in Ringer′s and Hank′s solutions[J]. Surface and Coatings Technology, 2016, 299: 7-14.
[18] WARCHOLINSKI B, GILEWICZ A, RATAJSKI J, et al.An analysis of macroparticle-related defects on CrCN and CrN coatings in dependence of the substrate bias voltage[J]. Vacuum, 2012, 86: 1235-1239.
[19] FERREIRA F, OLIVEIRA J C, CAVALEIRO A.CrN thin films deposited by HiPIMS in DOMS mode[J]. Surface and Coatings Technology, 2016, 291: 365-375.
[20] 刘星, 王明娥, 孙刚, 等. 可控阴极弧制备的梯度及调制多层CrN/Cr薄膜的组织结构和力学性能研究[J]. 真空科学与技术学报, 2015, 35(12): 1489-1494.
[21] ANGERER P, LACKNER J M, WIESSNER M, et al.Chromium/chromium nitride multilayers during thermal treatment: an X-ray diffraction study[J]. International Journal of Refractory Metals and Hard Materials, 2013, 36: 101-105.
[22] HU P F, JIANG. B L.Study on tribological property of CrCN coating based on magnetron sputtering plating technique[J]. Vacuum, 2011, 85(11): 994-998.
[23] VENKATRAJU J, KANG S H, PAMMI S, et al.Thermoelectric properties of nanocomposite n-type Cr₂O₃/Cr thin films deposited by a reactive sputtering[J]. Vacuum, 2016, 140: 71-75.
[24] CHERUVU N S, WEI R, GANDY D W.Influence of thermal exposure on the stability of metastable microstructures of sputter deposited nanocrystalline 304 and 310 stainless steel coatings[J]. Surface and Coatings Technology, 2010, 205: 1211-1219.
[25] WANG Y, ALSMEYER D C, MCCREERY R L.Raman spectroscopy of carbon materials: structural basis of observed spectra[J]. Chemistry of Materials, 2002, 2(5): 557-563.
[26] BANDEIRA A L, TRENTIN R, AGUZZOLI C, et al.Sliding wear and friction behavior of CrN-coating in ethanol and oil-ethanol mixture[J]. Wear, 2013, 301(1/2): 786-794.
[27] WANG T G, LIU Y, SINA H, et al.High-temperature thermal stability of nanocrystalline Cr₂O₃ films deposited on silicon wafers by arc ion plating[J]. Surface and Coatings Technology, 2013, 228: 140-147.
[28] CHENG Y H, QIAO X L, CHEN J G, et al.Dependence of the composition and bonding structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation on the deposition temperature[J]. Diamond and Related Materials, 2002, 11(8): 1511-1517.
[29] SHI Y J, LONG S Y, FANG L, et al.Effect of nitrogen content on the properties of CrNxOyCz coating prepared by DC reactive magnetron sputtering[J]. Applied Surface Science, 2018, 254(18): 5861-5867.

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FCVAD技术制备CrCN薄膜的热稳定性研究

Study on Thermal Stability of CrCN Films Prepared by FCVAD Technology

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