分段集成抽真空系统及工艺方法*

doi:10.13385/j.cnki.vacuum.2024.06.07

真空 ›› 2024, Vol. 61 ›› Issue (6): 38-42.doi: 10.13385/j.cnki.vacuum.2024.06.07

分段集成抽真空系统及工艺方法^*

孙振中¹, 施敏海¹, 陈光奇¹, 魏裕隆¹, 吴辰睿¹, 魏海波²

1.江苏深绿新能源科技有限公司,江苏江阴 214400;
2.辽宁装备制造职业技术学院,辽宁沈阳 110161

收稿日期:2023-08-29 出版日期:2024-11-25 发布日期:2024-11-29
作者简介:孙振中（1987-）,男,河南省濮阳市人,学士,工程师。通讯作者：陈光奇,高级工程师。
基金资助:
* 2021年辽宁省教育厅科学研究项目面上项目（LJKZ1282）

Segmented Integrated Vacuum Pumping System and Process Method

SUN Zhen-zhong¹, SHI Min-hai¹, CHEN Guang-qi¹, WEI Yu-long¹, WU Chen-rui¹, WEI Hai-bo²

1. Jiangsu Serlng New Energy Technology Co., Ltd., Jiangyin 214400, China;
2. Liaoning Equipment Manufacture College of Vocational and Technology, Shenyang 110161, China

Received:2023-08-29 Online:2024-11-25 Published:2024-11-29

摘要/Abstract

摘要： 通过对抽真空系统和工艺方法的研究分析,提出了分段集成抽真空系统及工艺方法,即将高中低真空管路、多种类真空机组和过程控制系统集成为一体的、批量化的抽真空系统。由计算机控制抽真空系统根据对工艺过程数据采集与工艺数据库的数据分析识别,自动对单体工件调控抽真空工艺程序。控制系统还可通过对工艺过程的数据统计分析,完善工艺数据库及工艺程序,进而对工艺过程自动识别调控,逐个提示工艺参数和提出异常处理建议,实现无人化智能抽真空作业管理。该系统及工艺方法能够降低设备的占有率,合理调配设备的运行和维护,提高设备利用率,降低能耗,提高生产率和工艺品质。

关键词: 真空获得, 抽真空工艺, 工艺过程控制, 自动化控制

Abstract: By studying and analyzing the vacuum pumping system and process methods, a segmented integrated vacuum pumping system and process method was proposed. A system that integrates high, medium, and low vacuum pipelines, various types of vacuum units, and process control systems to achieve batch vacuum pumping of products. The computer-controlled vacuum pumping system automatically regulates the vacuum pumping process program for individual workpiece based on data collection of the process and data analysis and identification of the process database. The control system can also improve the process database and process procedures through statistical analysis of process data, thereby automatically identifying and regulating the process, prompting process parameters one by one, and providing suggestions for abnormal handling, achieving unmanned intelligent vacuum operation management. This system and process method can reduce equipment occupancy, reasonably allocate equipment operation and maintenance, improve equipment utilization, reduce energy consumption, and improve productivity and process quality.

Key words: vacuum acquisition, vacuum pumping process, process control, automation control

中图分类号: TB751

孙振中, 施敏海, 陈光奇, 魏裕隆, 吴辰睿, 魏海波. 分段集成抽真空系统及工艺方法^*[J]. 真空, 2024, 61(6): 38-42.

SUN Zhen-zhong, SHI Min-hai, CHEN Guang-qi, WEI Yu-long, WU Chen-rui, WEI Hai-bo. Segmented Integrated Vacuum Pumping System and Process Method[J]. VACUUM, 2024, 61(6): 38-42.

参考文献

[1] LIU J M, LEI D Q, LI Q.Vacuum lifetime and residual gas analysis of parabolic trough receiver[J]. Renewable Energy, 2016, 86(2): 949-954.
[2] REINERT W, KAHLERD, LONGONI G.Assessment of vacuum lifetime in nL-packages[C]//Electronic Packaging Technology Conference. Singapore: IEEE, 2005.
[3] 毕龙生, 聂裕民, 魏小平. 多层绝热低温容器的抽气技术[J]. 真空科学与技术学报, 1982(3): 149-156.
[4] 毕龙生, 聂裕民, 陈光奇, 等. 低温容器抽真空新工艺及其应用的经济效益[J]. 真空科学与技术学报, 1985(4): 56-61.
[5] 金新, 徐小农. 杜瓦容器或环模系统真空抽气规律[J]. 低温工程, 1992(2): 1-4.
[6] 刘凤梁, 汪荣顺, 张曙光, 等. 低温储罐抽真空工艺试验研究[J]. 低温与超导, 2004, 32(4): 50-52.
[7] 李阳, 魏蔚, 李祥东, 等. 高真空多层低温气瓶真空获得与维持的试验研究[C]//第八届全国低温工程大会. 北京, 2007: 51-55.
[8] 沈卫东, 尤振宇, 雷体平, 等. 低温容器置换工艺的探讨研究[J]. 中国化工装备, 2021, 23(2): 45-48.
[9] 李伟, 谢淑贤. 冷冻液化气体罐式集装箱抽真空系统及方法的改进与优化[J]. 中国新技术新产品, 2022(2): 95-98.
[10] 章宇庆, 李艳, 余枫, 等. 多层低温绝热容器抽真空系统设计及应用[J]. 装备制造技术, 2022(3): 33-37.
[11] Powder / Bulk Solids Group. Central vacuum system[J]. Powder / Bulk Solids, 2022, 40(6): 40.
[12] 严东海, 孙守祁. 中国环流器HL—IM装置的真空抽气系统[J]. 四川真空, 1995(1): 1-7.
[13] 李加宏, 胡建生, 王小明, 等. EAST超导托卡马克装置真空抽气系统[J]. 真空, 2010, 47(1): 11-14.
[14] 蔡潇, 曹曾, 张炜, 等. HL-2M装置真空室预抽气系统的研制[J]. 真空, 2021, 58(1): 33-37.
[15] 张成, 王秋萍, 袁毅夫, 等. 一种多点抽真空系统及多点抽真空方法: CN104274991A[P].2015-01-14.
[16] 封拥军, 周东平, 崔世甲, 等. 一种多路多控式抽真空系统设备及抽真空方法: CN113249708A[P].2021-08-13.
[17] ROCHA A P, BLANCHARD S, FRAGA L, et al.Integration of the vacuum SCADA with CERN's enterprise asset management system[C]// Proceedings of the 16th International Conference on Accelerator and Large Experimental Control Systems. Barcelona, Spain: JACoW Publishing, 2017.
[18] JEC Composites Magazine Group. RTM central vacuum system from oerlikon leybold vacuum[J]. JEC Composites Magazine, 2012 (73): 36.
[19] Chemical Engineering World Group. Central vacuum system[J]. Chemical Engineering World, 2017,52(11): 80.
[20] 刘玉魁, 杨建斌, 肖祥正. 真空工程设计[M]. 2版.北京: 化学工业出版社, 2023.

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分段集成抽真空系统及工艺方法^*

Segmented Integrated Vacuum Pumping System and Process Method

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