脉管制冷机的研究进展及其仿真优化*

doi:10.13385/j.cnki.vacuum.2024.04.07

摘要/Abstract

摘要： 脉管制冷机具有高稳定性、持久运行和低振动等特性,符合高真空设备低温泵对冷源的要求,在低温真空泵领域的关注度越来越高。本文首先介绍了脉管制冷机的基本原理和分类,然后按照驱动方式总结了不同脉管制冷机的最新研制进展,最后重点分析了不同仿真方法在脉管制冷机研发和优化过程中的实际应用。

关键词: 低温真空泵, 脉管制冷机, 仿真优化

Abstract: Higher stability, longer operating time and low vibration characteristics of pulse tube cryocooler （PTC） meet the requirements of high vacuum equipment and low-temperature pumps for cold sources, so PTC is increasingly popular in the field of low-temperature vacuum pumps. First, the basic principle and classification of PTC is introduced. And then, the latest development progress of PTC is summarized according to the driving mode. Finally, the advantages and disadvantages of different simulation methods in the development and optimization process are analyzed emphatically.

Key words: cryopump, pulse tube cryocooler, simulation optimization

中图分类号: TB752⁺.53

姜远镇, 邓家良, 韩雨松, 武义锋. 脉管制冷机的研究进展及其仿真优化^*[J]. 真空, 2024, 61(4): 35-41.

JIANG Yuan-zhen, DENG Jia-liang, HAN Yu-song, WU Yi-feng. Latest Research Progress and Simulation Optimization of Pulse Tube Cryocooler[J]. VACUUM, 2024, 61(4): 35-41.

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