PVD涂层真空磁控溅射镀膜设备优化传动控制技术*

doi:10.13385/j.cnki.vacuum.2026.03.04

摘要/Abstract

摘要： 为解决真空磁控溅射镀膜设备因传动链扭振与磁路干扰导致的传动系统的控制精度低、响应迟缓问题,研究了PVD涂层真空磁控溅射镀膜设备优化传动控制技术。基于真空磁控区域,明确振动传递目标,并以该目标为导向,加装阻尼减震器以抑制外部磁路干扰,实现传动链的扭振隔离。在隔离状态下,采用集成传动方式,通过增设衔铁抵消磁阻,在传动链上建立调度关联,实现虚拟阻尼的传动集成。采用交叉闭环方式,按照传动集成顺序进行协同处理,以实现最终控制任务。实验结果表明：提出方法得到的镀膜设备传动控制时延基本保持在0.5 s以下,重复传动控制定位最高精度可提升至97%,反映了传动控制效果的强化,凸显其优越的性能。

关键词: PVD涂层, 真空磁控溅射, 镀膜设备, 传动优化, 实时控制

Abstract: Aiming at the problems of low control accuracy and slow response of the transmission system caused by torsional vibration of the transmission chain and magnetic circuit interference in vacuum magnetron sputtering coating equipment, the optimization transmission control technology of PVD coating vacuum magnetron sputtering coating equipment was studied. Based on the vacuum magnetic control area, the vibration transmission target was clarified, which was used as a guide to install damping shock absorbers to suppress external interference and achieve torsional vibration isolation of the transmission chain. In an isolated state, an integrated transmission method is adopted to achieve virtual damping transmission integration by adding an armature to counteract magnetic resistance and establishing scheduling associations on the transmission chain. Adopting a cross closed loop approach, collaborative processing is carried out in the order of transmission integration to achieve the final control task. The experimental results show that the transmission control delay of the coating equipment obtained by the proposed method is basically kept below 0.5 s, and the positioning accuracy of repeated transmission control is improved to 97%, which reflects the enhancement of the transmission control effect and highlights its superior performance.

Key words: PVD coating, vacuum magnetron sputtering, coating equipment, drive optimization, real-time control

中图分类号: TN305.8

段卓馨. PVD涂层真空磁控溅射镀膜设备优化传动控制技术^*[J]. 真空, 2026, 63(3): 28-35.

DUAN Zhuoxin. Optimized Drive Control Technology for PVD Coating Vacuum Magnetron Sputtering Equipment[J]. VACUUM, 2026, 63(3): 28-35.

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