半导体领域中干式螺杆真空泵发展现状*

doi:10.13385/j.cnki.vacuum.2026.05.06

真空 ›› 2026, Vol. 63 ›› Issue (5): 42-47.doi: 10.13385/j.cnki.vacuum.2026.05.06

半导体领域中干式螺杆真空泵发展现状^*

高宝华¹, 袁博², 李庆飞¹, 彭亮¹, 赵冠华¹, 顾隆杰², 杜广煜²

1.上海斯可络压缩机有限公司,上海 201504;
2.东北大学机械工程与自动化学院,辽宁沈阳 110819

收稿日期:2025-12-25 出版日期:2026-09-25 发布日期:2026-09-28
通讯作者: 高宝华,工程师。
作者简介:高宝华（1973-）,男,江苏姜堰,工程师,本科。
基金资助:
*金山区企业产学研科技成果转化项目（2024-CXY-02）

Development Status of Dry Screw Vacuum Pumps in the Semiconductor Field

GAO Baohua¹, YUAN Bo², LI Qingfei¹, PENG Liang¹, ZHAO Guanhua¹, GU Longjie², DU Guangyu²

1. Shanghai Screw Compressor Co., Ltd., Shanghai 201504, China;
2. School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China

Received:2025-12-25 Online:2026-09-25 Published:2026-09-28

摘要/Abstract

摘要： 干式螺杆真空泵作为一种先进的机械真空泵,凭借其抽速范围宽、无油污染、耐腐蚀及卓越的粉尘处理能力,已成为半导体领域真空获得系统的核心装备。本文系统阐述了干式螺杆真空泵在物理气相沉积、化学气相沉积、刻蚀及硅片制造等半导体领域关键工艺中的应用现状,分析了其在处理强腐蚀性气体、粉尘时的技术适应性。对比剖析了多级罗茨泵、干式爪式泵、干式涡旋泵在半导体工艺应用中的结构缺陷与技术局限。此外,本文结合当前市场格局,分析了国内企业在打破海外垄断、推动国产化替代进程中取得的突破与面临的挑战,展望了面向先进制程的智能化、高洁净度及多学科交叉融合的发展趋势。

关键词: 半导体领域, 干式螺杆真空泵, 真空镀膜, 国产化替代

Abstract: As an advanced mechanical vacuum pump, the dry screw vacuum pump has become core equipment in the vacuum acquisition system in the semiconductor field, owing to its wide pumping speed range, oil-free pollution, corrosion resistance, and excellent dust handling capability. This article systematically expounds the application status of dry screw vacuum pumps in key semiconductor processes, such as physical vapor deposition, chemical vapor deposition, etching, and silicon wafer manufacturing, while analyzing their technical adaptability in handling highly corrosive gases and dust. Through comparative analysis, it identifies structural defects and technical limitations of multi-stage roots pumps, dry claw pumps, and dry scroll pumps in semiconductor process applications. Furthermore, based on the current market landscape, this article analyzes the breakthroughs and challenges faced by domestic enterprises in breaking overseas monopolies and promoting domestic substitution. It also looks forward to the development trend of intelligence, high cleanliness, and multidisciplinary integration for advanced manufacturing processes.

Key words: semiconductor field, dry screw vacuum pump, vacuum coating, localization substitution

中图分类号: TB752

高宝华, 袁博, 李庆飞, 彭亮, 赵冠华, 顾隆杰, 杜广煜. 半导体领域中干式螺杆真空泵发展现状^*[J]. 真空, 2026, 63(5): 42-47.

GAO Baohua, YUAN Bo, LI Qingfei, PENG Liang, ZHAO Guanhua, GU Longjie, DU Guangyu. Development Status of Dry Screw Vacuum Pumps in the Semiconductor Field[J]. VACUUM, 2026, 63(5): 42-47.

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半导体领域中干式螺杆真空泵发展现状^*

Development Status of Dry Screw Vacuum Pumps in the Semiconductor Field

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