基于AlCrN涂层与模糊PID控制的干式螺杆真空泵平衡方法

doi:10.13385/j.cnki.vacuum.2026.05.07

摘要/Abstract

摘要： 为解决干式螺杆真空泵在真空环境下输送腐蚀性介质时,出现的转子腐蚀与压力失衡问题,提出了一种基于AlCrN涂层与模糊PID控制的干式螺杆真空泵平衡方法。通过基材预处理、真空室准备、离子刻蚀清洗及过渡层与涂层沉积步骤,采用磁控溅射技术在永磁铁氧体转子表面制备3~5 μm厚的AlCrN涂层,以提升其本征抗腐蚀能力;设计了由不锈钢盘与石墨盘组成的压力平衡装置,并引入模糊PID控制器,通过实时计算吸气腔与油箱腔之间的压差及变化率,动态调整动静环之间的轴向间隙,实现真空泵的压力平衡控制。结果表明：在真空度为150 Pa时,该技术能显著改善轴向间隙液体静压力分布均匀性;100~1 000 Pa真空度下,轴向窜动量被抑制在0.01~0.05 mm范围内,窜动抑制率最高可达95.7%;当真空度发生突变时,真空泵转子运转同轴度仍稳定在允许范围内(0.010~0.015 mm),有效保障了真空泵运行稳定性与可靠性,为干式螺杆真空泵在输送高腐蚀性介质的工况下,提供了兼具长效防腐与动态稳定性的可靠技术方案。

关键词: 螺杆真空泵, 腐蚀性介质, 动态平衡, AlCrN涂层, 模糊PID, 轴向窜动控制

Abstract: To solve the problems of rotor corrosion and pressure imbalance in dry screw vacuum pumps for transporting corrosive media in vacuum environments, a balance method for dry screw vacuum pumps based on AlCrN coating and fuzzy PID control was proposed. By using substrate pretreatment, vacuum chamber preparation, ion etching cleaning, and transition layer and coating deposition steps, a 3-5 μm thick AlCrN coating was prepared on the surface of a permanent ferrite rotor using magnetron sputtering technology to enhance its intrinsic corrosion resistance. A pressure balancing device consisting of stainless steel and graphite disks was designed, and a fuzzy PID controller was introduced to dynamically adjust the axial clearance between the dynamic and static rings by calculating the pressure difference and change rate between the suction chamber and the oil tank chamber in real time, achieving pressure balance control of the vacuum pump. The results show that, at a vacuum degree of 150 Pa, this technology can significantly improve the uniformity of the distribution of hydrostatic pressure in the axial gap. Under a vacuum degree of 100-1 000 Pa, the axial displacement is suppressed within 0.01-0.05 mm, with a maximum displacement suppression rate of 95.7%. When the vacuum degree undergoes a sudden change, the coaxiality of the vacuum pump rotor remains stable within the allowable range of 0.010-0.015 mm, effectively ensuring the stability and reliability of the vacuum pump operation. This provides a reliable technical solution for dry screw vacuum pumps under high corrosive medium transportation conditions, combining long-term anti-corrosion performance and dynamic stability.

Key words: screw vacuum pump, corrosive media, dynamic balance, AlCrN coating, fuzzy PID, axial play control

中图分类号: TB752

赵艳军, 王永军, 雷国斌, 吴志昂. 基于AlCrN涂层与模糊PID控制的干式螺杆真空泵平衡方法[J]. 真空, 2026, 63(5): 48-54.

ZHAO Yanjun, WANG Yongjun, LEI Guobin, WU Zhi'ang. Balance Method of Dry Screw Vacuum Pump Based on AlCrN Coating and Fuzzy PID Control[J]. VACUUM, 2026, 63(5): 48-54.

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