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VACUUM ›› 2019, Vol. 56 ›› Issue (3): 1-5.doi: 10.13385/j.cnki.vacuum.2019.03.01

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Vacuum system fault diagnosing and troubleshooting

JIANG Xie-chang   

  1. Shenyang Vacuum Technology Institute, Shenyang 110042, China
  • Received:2018-04-01 Published:2019-06-26

Abstract: The vacuum pumping technologies are discussed and it will give years of reliable service when properly applied and operated. However, when troubleshooting is required, the fault diagnosing and applying correct solution can be equally as important.

Key words: vacuum pumping technology, fault diagnosing and troubleshooting

CLC Number: 

  • TB75
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