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VACUUM ›› 2021, Vol. 58 ›› Issue (1): 6-9.doi: 10.13385/j.cnki.vacuum.2021.01.02

• Measurement and Control • Previous Articles     Next Articles

Design and Characteristic Study on Compact Microwave ECR Plasma Source

CHAI Hao1, JIA Jun-wei1, WANG Bin2, LI Peng2, CUI Shuang2, FENG Xu3, LI Wei1, LIU Zhan1, LI Shao-fei1, CHEN Quan1   

  1. 1. Beijing Orient Institute of Measurement and Test,Beijing 100094,China;
    2. Beijing Institute of Space Mechanical and Electricity,Beijing 100076,China;
    3. Beijing Institute of Spacecraft System Engineering,Beijing 100094,China
  • Received:2020-02-20 Online:2021-01-25 Published:2021-01-26

Abstract: Space missions such as electrical propulsion experiment and Langmuir probe payload calibration demand the plasma parameter calibration in order to ensure the accuracy of the measurement results. At present,the calibration of plasma parameters is mainly achieved in a stable plasma environment through comparison of the instrument and the standard. Therefore, obtaining a stable plasma environment is a fundamental requirement for the study of plasma calibration. The microwave ECR source has the characteristics of uniformity, stability and wide adjustable range, which is quite suitable to apply in the plasma calibration. In this paper, a compact permanent magnetic microwave ECR plasma source was designed and studied, and its spatial distribution and stability were obtained. The experimental results show that the stability and repeatability of the microwave ECR source used in this experiment could achieve less than 10%, which has potential to be applied as the standard plasma source for the plasma parameter calibration.

Key words: ECR source, plasma calibration, spatial distribution, stability

CLC Number: 

  • TB79
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