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VACUUM ›› 2021, Vol. 58 ›› Issue (1): 1-5.doi: 10.13385/j.cnki.vacuum.2021.01.01

• Measurement and Control •     Next Articles

Study on Working Performance for Low Pressure Carbon Nanotube Micro Sensor

WANG Jie, KANG Song, DONG Chang-kun   

  1. Wenzhou Key Lab of Micro-Nano Optoelectronic Devices, Wenzhou University, Wenzhou 325035, China
  • Received:2020-04-29 Online:2021-01-25 Published:2021-01-26

Abstract: For small type vacuum devices such as X-ray tubes, there are lacks of reliable method to monitor the internal vacuum. Based on the influences of gas adsorptions on carbon nanotube(CNT) field electron emissions, we developed a miniature low pressure sensor. This work studies the field emission performance, as well as sensing performances, repeatability, and application properties of the sensor. The experimental results show that the carbon nanotubes prepared by the Ni alloy distribute uniformly on the surface with high crystallinity and good field emission performance. The sensor exhibits good sensing effects for nitrogen and water gases, and the field emission current increases with the system pressures. Multiple tests at the same pressure point show that the measurement consistency of the sensor is better than 10%. The application of the sensor inside the X-ray tube shows that the sensor is able to monitor the real time change of the vacuum inside the X-ray tube, therefore, the sensor could measure the internal vacuums of micro-vacuum electronic devices effectively.

Key words: carbon nanotube, adsorption, field emission, pressure sensing

CLC Number: 

  • TB383
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