For small type vacuum devices such as X-ray tubes, there are lacks of reliable method to monitor the internal vacuum. Based on the influences of gas adsorptions on carbon nanotube(CNT) field electron emissions, we developed a miniature low pressure sensor. This work studies the field emission performance, as well as sensing performances, repeatability, and application properties of the sensor. The experimental results show that the carbon nanotubes prepared by the Ni alloy distribute uniformly on the surface with high crystallinity and good field emission performance. The sensor exhibits good sensing effects for nitrogen and water gases, and the field emission current increases with the system pressures. Multiple tests at the same pressure point show that the measurement consistency of the sensor is better than 10%. The application of the sensor inside the X-ray tube shows that the sensor is able to monitor the real time change of the vacuum inside the X-ray tube, therefore, the sensor could measure the internal vacuums of micro-vacuum electronic devices effectively.

Space missions such as electrical propulsion experiment and Langmuir probe payload calibration demand the plasma parameter calibration in order to ensure the accuracy of the measurement results. At present,the calibration of plasma parameters is mainly achieved in a stable plasma environment through comparison of the instrument and the standard. Therefore, obtaining a stable plasma environment is a fundamental requirement for the study of plasma calibration. The microwave ECR source has the characteristics of uniformity, stability and wide adjustable range, which is quite suitable to apply in the plasma calibration. In this paper, a compact permanent magnetic microwave ECR plasma source was designed and studied, and its spatial distribution and stability were obtained. The experimental results show that the stability and repeatability of the microwave ECR source used in this experiment could achieve less than 10%, which has potential to be applied as the standard plasma source for the plasma parameter calibration.

There are characteristics of easy adjustment of permeability and good stability for porous graphene membrane that can realize a controllable nano-permeable component as materials of standard leak in vacuum leak. In this paper, MD simulation is used to simulate the helium permeation of single-layer porous graphene, and the helium permeation parameters of porous graphene in different directions and different forms are obtained. The simulation result shows that the number of defective carbon rings and the helium permeation rate of graphene defects can be approximately linear along the zigzag direction and the diagonal direction, and the slopes are approximately equal. The helium permeation rate of graphene with different graphene shapes is similar when the number of missing carbon rings in monolayer porous graphene is small, and the permeation increment is obtained by calculating and simulating the barrier reduction when the number of missing carbon rings is large. This conclusion proves the controllability of porous graphene as materials of standard leak, which has guiding significance for permeation experiments.

The normal vacuum gauge, application of single chip microcomputer in vacuum gauge, the vacuum measurement in the application for aerospace, the standard of the vacuum measurement, and the application of carbon nanotube cathode in ionization gauge are introduced simply in this paper.

Combined with hardware structure design, network communication, website development and other technologies, this paper studies and designs a set of B/S mode intelligent screw air compressor performance test system, including the design of hardware test structure and cloud software system,as well as the implementation of key technologies. The system can automatically collect test data, calculate the performance parameters and energy efficiency values of the whole machine according to the air compressor acceptance test standards, generate test reports, and form the big data of air compressor test. Users can analyze statistics at any time, form various charts, etc. It meets the testing needs of various aspects of the product, and complys with the development trend of product intelligence and information technology.

In view of the obvious homogeneity of screw vacuum pump products in our country and the current situation that they are not suitable for the diverse needs of users, this paper, from the perspective of screw vacuum pump design, attempts to carry out comparative analysis of design ideas and schemes from the aspects of overall structure layout of screw pump, variable pitch mode of screw rotor, cooling system and temperature control, sealing form and so on. This paper puts forward the design principles of both standardized mass production and personalized small batch customization for the special needs of users, and gives the specific implementation strategy. It may contribute to the improvement of screw pump product development and manufacturing level in China.

In order to make the vacuum pump suction capacity can adapt to the degassing process to the greatest extent, the number of stirred gas, the surface of the equipment and the leakage rate of the equipment should be considered when choosing the vacuum pump. With the development of liquid steel vacuum treatment technology, it is an urgent problem to remove the gas in liquid steel efficiently. Due to the comprehensive factors such as dust and maintenance times, steam jet pump with large extraction capacity, strong operation reliability and simple structure should be adopted instead of mechanical pump. However, in recent years, due to the excessive pumping capacity of dry mechanical pump, high temperature and humidity, inflammable and explosive problems, spraying system is still used in the vacuum equipment of liquid steel vacuum treatment. Therefore, further research should be conducted on the selection, configuration, distribution and determination of compression ratio, temperature rise calculation, efficiency calculation, torque calculation and speed control of Roots pump in the future to solve practical problems.

In order to check whether the design, manufacture and assembly of the HL-2M vacuum vessel meet the ultrahigh vacuum requirement, a pumping system was established in the factory to test the vacuum performance of HL-2M vacuum vessel after pre-assembly. Pumping by a primary pumping system with three molecular pump and a cryo-pump, the pressure in the vacuum vessel reaches 3.7×10^-5 Pa after 72 hours, which is better than the expected value. After that, the total leak and outgassing rate is tested by static constant volume method. The result shows that, the total leak rate is 2.3 ×10^-7Pa·m³·s^-1, which is lower than that of HL-2A by two orders of magnitude. The test shows that with reasonable pumping system setting, the ultrahigh vacuum condition of HL-2M is achieved, which will provide a favorable condition for its future plasma operation.

In this paper,a series of particle image velocimetry（PIV） flow field experiments of rarefied gas flow were carried out by setting up a set of experimental apparatus that can adjust the vacuum degree and gradually reduce the system pressure from atmospheric pressure. The system pressure was successively reduced from 101kPa and 90kPa to 10kPa,and PIV experiments were carried out with selected particles under different system pressures to obtain the flow field distribution in the as-measured area. The CFD method was used to simulate the internal flow in the experimental area under atmospheric pressure,and the comparison results show that the numerical simulation results are in good agreement with the flow field structure measured by PIV experiment, thus verifying the reliability and stability of the experiment and numerical simulation. By analyzing the results of PIV experiment：Knudsen number Kn≤0.14 better flow field effect can be obtained by experimental measurement; When 0.14<Kn≤0.29,the flow state in the measured area is still complete but the measured flow field velocity is relatively small; When 0.29<Kn≤0.86,the measured velocity is significantly reduced and the flow pattern is incomplete.

In order to investigate the adsorption characteristics of molecular sieve adsorbents used in the interspace of cryogenic vessels, the adsorption isotherms of the 4A, 5A and 13X molecular sieves for N₂, O₂ single components and air were obtained by static expansion method. In the range of 10^-3~10³Pa, the differences in adsorption capacity of different molecular sieves for gases were compared, and the adsorption mechanism of molecular sieves was explored. The results show that the 5A and 13X molecular sieves have strong adsorption performance for N₂ and O₂ under vacuum conditions at liquid nitrogen temperature, the absorption capacity can reach 10⁴Pa·L/g magnitude. The adsorption capacity of O₂ in the 4A molecular sieve can also reach 10⁴Pa·L/g magnitude, while the 4A molecular sieve has poor nitrogen adsorption ability when the equilibrium pressure is higher, the saturated adsorption capacity reaches only about 300Pa·L/g. The adsorption capacity of the three molecular sieves for air follows 13X molecular sieve>5A molecular sieve>4A molecular sieve, and at liquid nitrogen temperature, the adsorption rate of 5A molecular sieve on air is higher than that of 13X molecular sieve. Studying the vacuum adsorption characteristics of molecular sieves at low temperatures helps to guide the application of molecular sieves in cryogenic vessels, which also provides a reference for the design of low temperature molecular sieves.

This paper presents a new vacuum baking facility based on the vacuum-baked method and blackbody heating technology, which can realize contaminant collection and high precision temperature control of the complex shaped spacecraft. Furthermore, the experimental approach presented is validated based on measurement data of the GCMS. The results show that the vacuum baking facility can control the contaminant in the test effectively. This new method allows versatile and adaptive test of the spacecraft.

Zirconium nitride thin films were deposited on SiO₂/Si(111) substrates by direct current(DC) reactive magnetron sputtering of a zirconium target with different nitrogen ratio(5%, 10%, 20%, 30%, 40%, 50%, 60%). The structure, morphology and composition of films were determined by XRD, SEM and EDS analysis. The reflection spectrum of the films was obtained by using a spectrophotometer, and the coordinates of L^*a^*b^* chromaticity were further determined. The effect of nitrogen partial pressure on the color of ZrN films and the relationship between the color and the composition and structure of ZrN films were studied. The experimental results show that all films are compact and homogeneous with increasement of nitrogen ratio. While the deposition rate decreased, the nitrogen content of the ZrN films increased, the crystallinity of the films increased first and then decreased, and the preferred(111) orientation of the films appeared with the nitrogen ratio of 10%. The film color changed significantly with the changing of the composition and structure of the films(from light gold to gold, dark gold, dark brown and non-intrinsic color). When the reaction gas N₂ is low, the zirconium and nitrogen atoms bonded easily with the increasing of nitrogen ratio. Naturally, the content of N in the films increased, and the crystallinity of ZrN increased and the preferred orientation appeared. When the nitrogen ratio over 10%, the excess nitrogen atoms in the interstitial positions of crystal makes the lattice distance larger and the crystallinity decreased. The film color also changed with the changing of composition and structure of the films.

In order to solve or reduce macro-particle pollution in arc ion plating, an extra biased electric field is applied during the deposition of TiN films. The influence of extra biased voltage on surface morphology, microstructure, micro-hardness, adhesion strength and friction coefficient of the TiN films is investigated. The results show that all the TiN films have(111) preferential growth plane, and the microstructure is little affected by the extra biased electric field. Both adhesion strength and micro-hardness of the TiN films increase with increasing voltage from 0 to 24V, followed by a small decrease at 32V. The extra biased field greatly improves surface morphology of TiN films, and the smallest friction coefficient of 0.115 is achieved at 32V.

To study the uniformity of the anti-seizing coating on the surface of the nuts and bolts of the supporting devices for the magnetic confinement fusion devices, copper films were prepared on the inner and outer wall of the cylindrical device by magnetron sputtering technology. The thickness of the films was measured by the step meter. A rectangular copper block was used as the magnetron sputtering target. The single rotation and revolution plus rotation were used to deposit copper films. The film thickness distribution on the inner wall and the outer wall of the cylindrical devices was analyzed. The results show that the uniformity of the films prepared by revolution plus rotation is better than that by single rotation. The thickness of the films increases with the decrease of the pore(tube) size.

Zinc oxide film material is considered to be the most potential transparent conductive film due to its high electrical conductivity, good optical transmittance, abundant raw material storage, and low cost. In particular, its wide band gap(3.37eV)and exciton binding energy up to 60 meV make it possible to prepare homojunction light-emitting devices and solar cell electron transport layers at ambient temperatures with great application prospects. However, it is difficult to achieve comprehensive control of the film quality by the traditional preparation method, and there are problems such as poor stability of p-ZnO, poor repeatability of the as-prepared film, and low efficiency of assembled devices. High-power pulsed magnetron sputtering(HiPIMS)technology has the characteristics of high ionization rate of the sputtering material, which is very suitable for the preparation of complex conductive films such as transparent conductive films and hard films. When HiPIMS is used to deposit oxides, carbides and nitrides, its high ionization rate can be used to obtain higher target ions and doped ions, which can form defects such as element substitution and interstitial atoms, and can be used to prepare stable p-type semiconductor material. In this paper, the research progress of zinc oxide thin films prepared by HiPIMS in recent years is reviewed. In view of the preparation problems of p-ZnO, the discharge characteristics and plasma parameters of ZnO thin films prepared by HiPIMS, undoped ZnO preparation, doped ZnO preparation, and plasma assist ZnO preparation and other aspects are summarized. Finally, the development direction of high-performance, high-quality, high-stability p-ZnO thin film preparation is prospected.

The system realizes tantalum anode block sintering process, including three thermal processes of presintering, sintering and cooling, as well as the control of metronomic feed in and out, auxiliary machine and other parts. Its control system realizes the full-automatic control function, which adopts the distributed structural design, system opening, hierarchical control, system construction and configuration scheme integrating detection, control, management, remote diagnosis and communication. The whole control strategy and operation control method of the whole process integrated control system for complex production and manufacturing of multi chamber tunnel continuous vacuum sintering and heat treatment equipment are developed to realize the optimization and optimal control of production process.

As a new degreasing method with great development prospect, vacuum degreasing drying is more efficient and environmentally friendly than conventional degreasing methods. This paper studies the temperature field of degreasing and drying system for air conditioning radiator, and simulates the suitable heat source layout of vacuum drying chamber by using FLUENT to optimize the temperature field distribution in degreasing chamber for further improving the degreasing efficiency.