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VACUUM ›› 2021, Vol. 58 ›› Issue (2): 10-14.doi: 10.13385/j.cnki.vacuum.2021.02.03

• Thin Film • Previous Articles     Next Articles

Effects of Modulation Ratio on Mechanical Properties of Cr/TiN Nano-multilayers Prepared by Arc Ion Plating

WU Yan-chao, LIU Yu-yao, LIU Yang, GAO Sheng-yuan, HUANG Mei-dong   

  1. College of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China
  • Received:2020-12-02 Online:2021-03-25 Published:2021-04-09

Abstract: Cr/TiN nanoscale multilayers were deposited by arc ion plating with different modulation ratios. The surface morphology, microstructure, hardness and adhesion strength to the substrate of the multilayers were investigated by SEM, AFM, XRD and nano-indenter, respectively. The results show that the Cr/TiN nano-multilayers have compact microstructure with smooth surfaces and comprehensively excellent mechanical properties, indicating nano-interface effects exist in the films. The maximum hardness of 33.22GPa was achieved as the modulation ratio of 2∶3 was applied.

Key words: arc ion plating, Cr/TiN nano-multilayers, hardness, modulation ratio

CLC Number: 

  • TB79
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