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VACUUM ›› 2021, Vol. 58 ›› Issue (3): 13-16.doi: 10.13385/j.cnki.vacuum.2021.03.03

• Vacuum Acquisition System • Previous Articles     Next Articles

Ion Pump Performance Test Used by Shanghai Synchrotron Radiation Facility

LI Bo1,2, LIU Jun-nan1,2, ZHANG Min1,2, XUE Song1,2, CHEN Ming1,2   

  1. 1. Shanghai Institute of Applied Physics, Chinese Academy of Science, Shanghai 201800, China;
    2. Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
  • Received:2020-07-21 Online:2021-05-25 Published:2021-06-01

Abstract: This article introduced the test methods of ion pump performance for Shanghai Synchrotron Radiation Facility. The ultimate vacuum, effective pumping speed and cleanliness of ion pump were investigated. The study showed that the measured values of the ultimate vacuum of the ion pump meet the requirements of ≤5.0×10-8Pa. The SIP200 and SIP400 both had a maximum nitrogen regeneration pumping rate in excess of their respective nominal pumping rates. The saturation pumping speed of the inert gas argon also exceeded 60% of their respective nominal pumping rates. The residual gas spectra measured by the quadrupole mass spectrometer indicated that the cleanliness of the ion pump meets the cleanliness requirements of the beamline of Shanghai Synchrotron Radiation Facility. The tested ion pump, installed on the beamline, works properly and the dynamic vacuum meets the vacuum design specifications.

Key words: synchrotron radiation, ultrahigh vacuum, ion pump, ultimate vacuum, pumping speed, RGA

CLC Number: 

  • TL503.7
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