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VACUUM ›› 2021, Vol. 58 ›› Issue (4): 98-102.doi: 10.13385/j.cnki.vacuum.2021.04.18

• Vacuum Technology Application • Previous Articles     Next Articles

Application of Ultra-high and High Vacuum Technology

MA Yi-Gang1, LI Zhi-hui2   

  1. 1. Sichuan Honghua Industrial Co., Ltd.,Leshan 614200, China;
    2. Shenyang Huizhen Vacuum Technology Co., Ltd.,Shenyang 110042,China
  • Received:2020-12-11 Online:2021-07-25 Published:2021-08-05

Abstract: The continuous expansion of the application field of vacuum technology has promoted the mutual integration of different disciplines and the birth of interdisciplinary. The advancement of ultra-high vacuum and high-vacuum technology has promoted the development of high-tech industries such as semiconductors, aerospace and nuclear power energy, and has provided a guarantee for the sustainable development of mankind. In recent years, vacuum chambers, pumps, valves, and seals have made new progress driven by the development of additive manufacturing, nuclear fusion, particle accelerators, and integrated circuits, which have supported important theoretical verification and major engineering construction, and gave birth to new scientific research achievements. This article focuses on the typical applications of several vacuum technologies, and discusses the key technologies among them.

Key words: ultra-high vacuum, additive manufacturing, vacuum pump, particle free valve, vacuum sealing

CLC Number: 

  • TB751
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