VACUUM ›› 2023, Vol. 60 ›› Issue (6): 22-31.doi: 10.13385/j.cnki.vacuum.2023.06.04
• Thin Film • Previous Articles Next Articles
LI Guo-hao, WAN Yi, ZHANG Xin-jie, DU Guang-yu
CLC Number: TG174.444
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