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VACUUM ›› 2024, Vol. 61 ›› Issue (2): 10-15.doi: 10.13385/j.cnki.vacuum.2024.02.02

• Thin Film • Previous Articles     Next Articles

Microstructure and Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering

LI Can-min1, DONG Zhong-lin1, XIA Zheng-wei1,2, ZHANG Xin-feng1, WEI Rong-hua3   

  1. 1. Anhui Chunyuan Coating Technology Co., Ltd., Hefei 230001, China;
    2. Hefei University of Technology, Hefei 230009, China;
    3. Southwest Research Institute, San Antonio 78238, USA
  • Received:2023-08-02 Online:2024-03-25 Published:2024-03-28

Abstract: Plasma enhanced magnetron sputtering (PEMS) method was used to deposit TiCrSiCN and TiCrSiCON nanocomposite coatings using trimethylsilane (Si-C) and hexamethyldisiloxane (Si-C-O) precursors on H13 steel. The influences of oxygen on the microstructure, phases, surface energy, hardness,friction coefficient,wear resistance and high-temperature oxidation properties of the coatings were studied by SEM, AFM, XRD, EDS, etc. The results show that the oxygen-containing TiCrSiCON coating shows a rougher surface with a looser microstructure and typical columnar feature, compared with the oxygen-free TiCrSiCN coating. As a result, the surface energy of the oxygen-containing coating is higher than the oxygen-free coating. The addition of oxygen improves the hardness of the nanocomposite coating, thereby significantly enhancing the anti-wear property of the coating. As for the coefficient of friction, there is no obvious difference between TiCrSiCN and TiCrSiCON coatings. The Cr and O in the TiCrSiCON coating could form a dense oxide film which can improve its high-temperature oxidation property.

Key words: PEMS, nanocomposite coating, microstructure, friction and wear property, surface energy, high-temperature oxidation property

CLC Number:  TB331;TB43;O484

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