VACUUM ›› 2022, Vol. 59 ›› Issue (3): 52-56.doi: 10.13385/j.cnki.vacuum.2022.03.11
• Thin Film • Previous Articles Next Articles
CHANG Zhen-dong1, DENG Zhong-hua2, SUN Rong-zhen2, MU Ren-de1, HU Jiang-wei2
CLC Number:
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