半球谐振子金属化镀膜残余应力的测量方法及影响因素研究*

doi:10.13385/j.cnki.vacuum.2022.02.11

Abstract

Abstract: The hemispherical resonator metallization coating is an important process in the manufacture of hemispherical resonator gyroscope. The residual stress of the film produced during the coating process has a great influence on the Q value of the resonator, which determines the final performance of the hemispherical resonator gyroscope, such as the stability of the bias.In this paper, X-ray diffraction method is used to measure the residual stress of the film, and the influence of the coating process parameters and the thickness of the film on the residual stress is studied.The results show that the film residual stress exhibits a state of compressive stress. As the sputtering power increases, the film stress increases first and then decreases, and there is a tendency to transform into tonsile stress. When the film thickness increases, the film stress first decreases slightly and then increases. The substrate temperature has no obvious regularity in the influence of the residual stress. The research in this paper may have important guiding significance for the establishment of the relationship model between the residual stress of the film and the Q value of the harmonic oscillator.

Key words: residual stress, process parameter, metallized coating, hemispherical harmonic oscillator

CLC Number:

TB383

ZHU Bei-bei, LIU Qing, QIN Lin, CHU Jian-ning, CHEN Xiao, WANG Xue-fang, XU Jian-feng. Research on Residual Stress Measuring Method and Influencing Factors of Metallized Coating on Hemispherical Harmonic Oscillator[J].VACUUM, 2022, 59(2): 55-61.

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Research on Residual Stress Measuring Method and Influencing Factors of Metallized Coating on Hemispherical Harmonic Oscillator

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