射频功率占比对氮掺杂二氧化钛薄膜性能的影响

doi:10.13385/j.cnki.vacuum.2020.01.05

真空 ›› 2020, Vol. 57 ›› Issue (1): 26-30.doi: 10.13385/j.cnki.vacuum.2020.01.05

射频功率占比对氮掺杂二氧化钛薄膜性能的影响

胡家培^1,2, 张华¹, 徐惠民¹, 曹强¹, 唐超³, 刘旭杰¹, 李炎峰¹

1.安徽科技学院机械工程学院,安徽凤阳 233100;
2.五河县职业技术学校,安徽蚌埠 233300;
3.神龙汽车有限公司,武汉湖北 430000

收稿日期:2019-04-25 出版日期:2020-01-25 发布日期:2020-03-17
通讯作者: 张华,博士,教授。
作者简介:胡家培(1989-),男,安徽省六安市人,硕士生。

Effect of RF Power Ratio on Properties of Nitrogen-Doped TiO₂ Film

HU Jia-pei^1,2, ZHANG Hua¹, XU Hui-min¹, CAO Qiang¹, TANG Chao³, LIU Xu-jie¹, LI Yan-feng¹

1.College of Mechanical Engineering, Anhui University of Science and Technology, Fengyang 233100, China;
2.Wuhe County Vocational and Technical School, Bengbu 233300, China;
3.Dongfeng Peugeot Citroen Automobile Company Ltd, Wuhan 430000, China

Received:2019-04-25 Online:2020-01-25 Published:2020-03-17

摘要/Abstract

摘要： 本研究主要利用射频耦合直流磁控溅射技术,在室温下用TiO₂陶瓷靶在玻璃基底上制备N掺杂到TiO₂薄膜。同时也利用光学轮廓仪、X射线衍射、扫描电子显微镜、X射线光电子能谱和紫外可见光分光光度计研究了不同射频功率占比对薄膜的微观结构和光学性能的影响。实验结果表明:随着射频功率的增加,薄膜的沉积速率增加,薄膜的结晶性变优,晶粒尺寸变大,N掺入的比例增加,Ti的价态出现未完全氧化的Ti³⁺,薄膜的禁带宽度也相应地减小,N掺杂TiO₂薄膜的吸收边扩展到可见光区域。

关键词: TiO₂薄膜, 射频功率占比, 直流耦合

Abstract: This study mainly used RF coupled DC magnetron sputtering technology to prepare N-doped TiO₂ thin films on glass substrates at room temperature with TiO₂ ceramic targets. At the same time, the effects of different RF power ratios on the microstructure and optical properties of the films were investigated by optical profilometry, X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy and UV-visible spectrophotometer. The experimental results show that, with the increase of RF power, the deposition rate of the film increases, the crystallinity of the film becomes better, the grain size becomes larger, the proportion of N doping increases, and the valence state of Ti shows incompletely oxidized Ti³⁺. The forbidden band width is also correspondingly reduced, and the absorption edge of the N-doped TiO₂ film is extended to the visible light region.

Key words: TiO₂ film, RF power ratio, DC coupling

中图分类号:

TB34

胡家培, 张华, 徐惠民, 曹强, 唐超, 刘旭杰, 李炎峰. 射频功率占比对氮掺杂二氧化钛薄膜性能的影响[J]. 真空, 2020, 57(1): 26-30.

HU Jia-pei, ZHANG Hua, XU Hui-min, CAO Qiang, TANG Chao, LIU Xu-jie, LI Yan-feng. Effect of RF Power Ratio on Properties of Nitrogen-Doped TiO₂ Film[J]. VACUUM, 2020, 57(1): 26-30.

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射频功率占比对氮掺杂二氧化钛薄膜性能的影响

Effect of RF Power Ratio on Properties of Nitrogen-Doped TiO₂ Film

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Effect of RF Power Ratio on Properties of Nitrogen-Doped TiO2 Film

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Effect of RF Power Ratio on Properties of Nitrogen-Doped TiO₂ Film