超高真空和高真空技术的应用

doi:10.13385/j.cnki.vacuum.2021.04.18

摘要/Abstract

摘要： 真空技术应用领域的不断拓展促进了不同学科间的相互融合和交叉学科的诞生。超高真空和高真空技术的进步推动了半导体、航天航空、核电能源等高技术产业的发展,为人类的可持续发展提供了保障。近些年,真空腔体、泵、阀门和密封件在增材制造、核聚变、粒子加速器和集成电路等领域发展的带动下取得新的进展,支撑了重要理论验证和重大工程建设,催生了新的科研成果。本文重点介绍了几种真空技术的典型应用,并对其中的关键技术进行论述。

关键词: 超高真空, 增材制造, 真空泵, 无颗粒阀门, 真空密封

Abstract: The continuous expansion of the application field of vacuum technology has promoted the mutual integration of different disciplines and the birth of interdisciplinary. The advancement of ultra-high vacuum and high-vacuum technology has promoted the development of high-tech industries such as semiconductors, aerospace and nuclear power energy, and has provided a guarantee for the sustainable development of mankind. In recent years, vacuum chambers, pumps, valves, and seals have made new progress driven by the development of additive manufacturing, nuclear fusion, particle accelerators, and integrated circuits, which have supported important theoretical verification and major engineering construction, and gave birth to new scientific research achievements. This article focuses on the typical applications of several vacuum technologies, and discusses the key technologies among them.

Key words: ultra-high vacuum, additive manufacturing, vacuum pump, particle free valve, vacuum sealing

中图分类号:

TB751

马义刚, 李智慧. 超高真空和高真空技术的应用[J]. 真空, 2021, 58(4): 98-102.

MA Yi-Gang, LI Zhi-hui. Application of Ultra-high and High Vacuum Technology[J]. VACUUM, 2021, 58(4): 98-102.

参考文献

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