热丝CVD法制备金刚石涂层刀具的研究现状*

doi:10.13385/j.cnki.vacuum.2022.01.08

摘要/Abstract

摘要： 金刚石涂层刀具具有优异的硬度、耐磨性及导热性,在军事、航空航天等高精尖应用领域加工石墨、高硅铝合金、碳纤维增强塑料等难切削材料时无可替代,但目前金刚石涂层刀具存在两个问题：一是涂层与刀具间膜基结合力较差,导致涂层在使用中过早脱落;二是涂层表面粗糙度较大,难以保证被加工面的平整度与尺寸精度。本文从增强涂层结合力与降低涂层粗糙度两方面,将近年来科研人员对HFCVD法制备金刚石涂层的研究成果加以综述,并分析了各种因素对金刚石涂层刀具性能的影响。

关键词: 热丝CVD, 硬质合金衬底, 金刚石涂层刀具, 膜基结合力, 表面粗糙度

Abstract: Diamond coated tools show excellent hardness,wear resistance and thermal conductivity. In military, aerospace and other high-end fields, there is no substitute for diamond coated tools in the processing of graphite, high silicon aluminum alloy, carbon fiber reinforced plastic and other difficult cutting materials. However, there are two problems with diamond coated tools. One is the poor adhesion between the coating and the cutting tool, which leads to the coating falling off prematurely in use. The other one is that it is difficult to ensure the flatness and dimensional accuracy of the machined surface due to the large surface roughness of the coating. In this paper, the research results of diamond coating prepared by HFCVD in recent years are reviewed from the aspects of enhancing the adhesion and reducing the roughness of coating, and the influence of various factors on the performance of diamond coated tools is analyzed.

Key words: hot filament CVD, cemented carbide substrate, diamond coated tool, film substrate bonding strength, surface roughness

中图分类号:

TQ127

万书宏, 林晶, 冯帅. 热丝CVD法制备金刚石涂层刀具的研究现状^*[J]. 真空, 2022, 59(1): 40-47.

WAN Shu-hong, LIN Jing, FENG Shuai. Research Progress of Diamond Coated Tools Prepared by Hot Filament CVD[J]. VACUUM, 2022, 59(1): 40-47.

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